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industrial use introduction industrial trichlorosilane class ii trichlorosilane use standard overview gb/t general terms scopethis standard relevant testing procedures hematology analyzer hematology
GB/T 28654-2018 in English

GB/T 28654-2018 in English

VALID

Trichlorosilane for industrial use

  • Issued on:2018-06-07
  • Implemented on:2019-01-01
  • File Format:PDF
  • Delivery:Via email within 1~3 business days
Price(USD): $250.00
$243.00
Standard No: GB/T 28654-2018
Document status: VALID
Title in English: Trichlorosilane for industrial use
Title in Chinese: 工业三氯氢硅
Language: English
File Format: Electronic (PDF)
Delivery: Via email within 1~3 business days
Issued on: 2018-06-07
Implemented on: 2019-01-01
Superseding: GB 28654-2012 Trichlorosilane for industrial use
ICS Classification: 71.060.99-Other inorganic chemicals
Chinese Classification: G14-Other inorganic chemicals
Professional Classification: GB-National Standard
Related Keywords: industrial use introduction
industrial trichlorosilane
class ii trichlorosilane
use
standard overview gb/t
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H spectrum triplet
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Trichlorosilane detection

本标准规定了工业三氯氢硅的分类、要求、试验方法、检验规则以及标志、标签、包装、运输、贮存。本标准适用于工业三氯氢硅,该产品主要作为多晶硅和硅烷偶联剂等的原料。


Introduction

1. Standard Overview

GB/T 28654—2018 "Industrial Trichlorosilane" is a Chinese national standard, which replaces the old standard GB/T 28654—2012. This standard specifies the classification, technical requirements, test methods, inspection rules, as well as marking, labeling, packaging, transportation and storage of industrial trichlorosilane.

2. Classification and technical indicators

Item Class I Class II
Trichlorosilane w/% 99.8 99.5 99.0 99.5 99.0 98.5
Dichlorosilane w/% 0.05 0.20 0.30 0.10 0.20 0.50

3. Background of Standard Formulation

The revision of this standard is mainly based on the following reasons:

  • Update normative reference documents to ensure alignment with the latest international standards.
  • Adjust technical indicators and add limit requirements for impurity elements such as aluminum and phosphorus.
  • Optimize test methods and simplify some redundant processes.

4. Experimental methods

This standard uses gas chromatography and inductively coupled plasma mass spectrometry (ICP-MS) for analysis:

Gas chromatography

Used to determine the content of trichlorosilane, dichlorodihydrosilane, silicon tetrachloride and chlorosilane polymers. It is recommended to use a capillary column (100% dimethylpolysiloxane), hydrogen as the carrier gas, and a thermal conductivity detector (TCD).

ICP-MS method

Used to determine the content of impurity elements such as aluminum, phosphorus, iron, chromium, copper, zinc, boron, gallium and indium. It is recommended to use a high-sensitivity inductively coupled plasma mass spectrometer, and use yttrium and cobalt as internal standard elements.

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