GB/T 28654-2018 in English
VALIDTrichlorosilane for industrial use
- Issued on:2018-06-07
- Implemented on:2019-01-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
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本标准规定了工业三氯氢硅的分类、要求、试验方法、检验规则以及标志、标签、包装、运输、贮存。本标准适用于工业三氯氢硅,该产品主要作为多晶硅和硅烷偶联剂等的原料。
Introduction
1. Standard Overview
GB/T 28654—2018 "Industrial Trichlorosilane" is a Chinese national standard, which replaces the old standard GB/T 28654—2012. This standard specifies the classification, technical requirements, test methods, inspection rules, as well as marking, labeling, packaging, transportation and storage of industrial trichlorosilane.
2. Classification and technical indicators
| Item | Class I | Class II | ||||
|---|---|---|---|---|---|---|
| Trichlorosilane w/% | 99.8 | 99.5 | 99.0 | 99.5 | 99.0 | 98.5 |
| Dichlorosilane w/% | 0.05 | 0.20 | 0.30 | 0.10 | 0.20 | 0.50 |
3. Background of Standard Formulation
The revision of this standard is mainly based on the following reasons:
- Update normative reference documents to ensure alignment with the latest international standards.
- Adjust technical indicators and add limit requirements for impurity elements such as aluminum and phosphorus.
- Optimize test methods and simplify some redundant processes.
4. Experimental methods
This standard uses gas chromatography and inductively coupled plasma mass spectrometry (ICP-MS) for analysis:
Gas chromatography
Used to determine the content of trichlorosilane, dichlorodihydrosilane, silicon tetrachloride and chlorosilane polymers. It is recommended to use a capillary column (100% dimethylpolysiloxane), hydrogen as the carrier gas, and a thermal conductivity detector (TCD).
ICP-MS method
Used to determine the content of impurity elements such as aluminum, phosphorus, iron, chromium, copper, zinc, boron, gallium and indium. It is recommended to use a high-sensitivity inductively coupled plasma mass spectrometer, and use yttrium and cobalt as internal standard elements.

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