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horizontal liquid phase liquid phase epitaxial system scopethis specification generic specification epitaxial systems karst speleology introduction standard framework real-time fluorescence automotive mirror manufacturers
SJ/T 11275-2002 in English

SJ/T 11275-2002 in English

VALID

Generic specification for horizontal liquid phase epitaxial system

  • Issued on:2002-10-30
  • Implemented on:2003-03-01
  • File Format:PDF
  • Delivery:Via email within 1~3 business days
Price(USD): $150.00
$146.00

本规范规定了卧式液相外延系统的术语、产品型号及命名方法、技术要求、试验方法、检验规则以及包装、运输、贮存。本规范适用于电子行业光电子器件研制、生产工艺中的卧式液相外延系统。其他行业的类似设备亦可参照执行。


Scope

This specification specifies the terminology, product models and naming methods, technical requirements, test methods, inspection rules, packaging, transportation, and storage of horizontal liquid phase epitaxy systems. This specification applies to horizontal liquid phase epitaxial systems in the development and production process of optoelectronic devices in the electronics industry. Similar equipment in other industries can also be implemented as a reference.

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