GB/T 11164-2011 in English
VALIDVacuum coating plant generic specification
- Issued on:2011-11-21
- Implemented on:2012-06-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
Price(USD):
$180.00
$175.00
$175.00
《GB/T 11164-2011真空镀膜设备通用技术条件》由TC18(全国真空技术标准化技术委员会)归口,主管部门为中国机械工业联合会。
Scope
This standard specifies the technical requirements, test methods, inspection rules and requirements for marking, packaging, transportation and storage of vacuum coating equipment. This standard applies to vacuum evaporation, sputtering, and ion plating vacuum coating equipment (hereinafter referred to as equipment) with a pressure in the range of 10-5 Pa to 10-3 Pa.
Sample only — not a preview of GB/T 11164-2011

Loading PDF document...
Error loading PDF. Please make sure the file is valid and try again.