GB/T 16879-1997 in English

VALID

Guidelines for precision and accuracy expression for mask writing equipment

Issued on:1997-06-20
Implemented on:1998-03-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $120.00
$117.00

Standard No:	GB/T 16879-1997
Document status:	VALID
Title in English:	Guidelines for precision and accuracy expression for mask writing equipment
Title in Chinese:	掩模曝光系统精密度和准确度的表示准则
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	1997-06-20
Implemented on:	1998-03-01
ICS Classification:	31.020-Electronic components in general
Chinese Classification:	L97-Dedicated processing equipment
Professional Classification:	GB-National Standard
Related Keywords:	mask exposure equipment mask manufacturing process pattern exposure precision accuracy expression equipment scopethis guideline specifies
Related Topics:	light system exposure Accuracy stability accuracy system accuracy GB/T+16879-1997 precision mask System precision Accuracy Peak precision equipment Lao Accuracy intra-day precision day-to-day precision Precision cavity mold Accurate tracer Accuracy Precision Principles speed accuracy Precision Accuracy Accuracy Precision cover up Product Standard Density Table photoelectric density Precision and Precision Precision and Intermediate Precision stability accuracy Precision standard System precision Precision and Accuracy day-to-day precision Interday precision and intraday precision Intra-day precision and inter-day precision intra-day precision day-to-day precision Instrument precision How to express intraday precision Optical Rotation Accuracy Definitions of intraday precision and interday precision Accuracy Requirements Accuracy precision indication indicating the precision Optical rotation indicates line accuracy Systematic precision and intermediate precision How precision is expressed How to express precision Accuracy Precision Repeatability period precision total imprecision Indication of precision Accuracy degree system gradient system Accuracy Precision Accuracy Measurement Precision and Accuracy Accuracy 3 expression of precision Photometric accuracy Intra-assay precision and between-assay precision GBT16879 Spectrometer Accuracy Inter-batch and intra-batch precision accuracy calculations How to balance accuracy and precision in liquid phase method validation The difference and connection between accuracy and correctness Between-day precision and intraday precision practices accuracy precision specificity accuracy precision precision concept imagej calculate optical density Determination of three concentrations of high, medium and low precision What is the difference between intra-day precision and intra-period precision? Day-to-day precision and batch-to-batch precision Within-batch precision and day-to-day precision Standard optical density The difference between precision and accuracy in method validation Electronic level accuracy representation method Air density viscosity standard table Method accuracy and precision verification Standard curve for measuring algae density using spectrophotometer Method validation precision and accuracy Precision expression methods include Experiment accuracy scoring standard table Accuracy standard deviation Accuracy formulated The difference between standardization and precision Interpretation of precision and accuracy in method comparison Expressed by accuracy and standard deviation Standard Deviation Imprecision Precision Examination of methodological accuracy and precision Dissolution Accuracy Optical rotation expression method Density Accuracy Standard Definition and expression of precision Precision and Accuracy in Method Validation

《GB/T 16879-1997掩模曝光系统精密度和准确度的表示准则》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本准则规定了在表示掩模曝光设备的精密度和准确度时应遵循的一般要求。掩模曝光设备的图形曝光精密度和准确度是通过测量制成的掩模来评估的，掩膜制造过程中的工艺条件对它有很大影响。所以，曝光条件应经厂家和用户双方同意。

Scope

This guideline specifies general requirements to be followed in expressing the precision and accuracy of mask exposure equipment. The pattern exposure precision and accuracy of mask exposure equipment is evaluated by measuring the fabricated mask, and the process conditions in the mask manufacturing process have a great influence on it. Therefore, the exposure conditions should be agreed by both the manufacturer and the user.

More samples: GB 50021-2001(2009) JC/T 2453-2018 QC/T 942-2021

Sample only — not a preview of GB/T 16879-1997