GB/T 26017-2020 in English
VALIDHigh purity copper
- Issued on:2020-09-29
- Implemented on:2021-08-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$117.00
《GB/T 26017-2020高纯铜》由TC243（全国有色金属标准化技术委员会）归口，TC243SC2（全国有色金属标准化技术委员会重金属分会）执行，主管部门为中国有色金属工业协会。
Introduction
Analysis of Standard Technology Evolution
The 2020 version of the standard added two ultra-high purity grades, HPCu-7N and HPCu-6N5, with copper purity reaching 99.99999% and 99.99995% respectively, reflecting the semiconductor industry's extreme requirements for material purity. Compared with the 2010 version, the main technological breakthroughs are reflected in:
| Technical Dimension | GB/T 26017-2010 | GB/T 26017-2020 | Significance of Upgrade |
|---|---|---|---|
| Purity Grade | Up to 6N | New 7N Grade | Meet the Demand of 5nm Process Chips |
| Element Control | 23 Impurities | New Cl Element Control | Preventing Integrated Circuit Corrosion |
| Detection Method | Including Appendix A | Using YS/T 922 uniformly | Improve detection consistency |
Analysis of key indicators
HPCu-7N has 5-10 times stricter limits on key impurities such as Ag and Fe than 6N, including:
- Ag≤0.05ppm (0.3ppm for the 2010 version)
- Fe≤0.01ppm (0.1ppm for the 2010 version)
- Added control requirements for Cl≤1ppm
Application implementation suggestions
Sputtering target selection plan
8-inch wafer manufacturing recommends the use of HPCu-6N5 grade, 12-inch wafers need to use HPCu-7N grade. Ningbo Jiangfeng Electronics' measured data shows that 7N copper target can reduce the film resistivity by 15%.
Packaging and transportation specifications
Aluminum-plastic bag vacuum packaging + nitrogen protection must be used, and the transportation environment humidity should be ≤40%RH. The case of Jinchuan Group shows that improper packaging will cause the surface oxide layer to thicken by 3nm.
Optimization of detection method
The new version cancels the glow discharge mass spectrometry appendix and uniformly adopts the YS/T 922 standard. The detection process should pay attention to:
- The sample needs to be pretreated with 1:1 nitric acid solution
- The cleanliness of the detection room must reach Class 100
- The resolution of the mass spectrometer should be ≥10,000
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