GB/T 26250-2010 in English
SUPERSEDEDGases for electronic industry—Arsine
- Issued on:2011-01-14
- Implemented on:2011-05-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$175.00
《GB/T 26250-2010电子工业用气体 砷化氢》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC1(全国半导体设备和材料标准化技术委员会气体分会)执行,主管部门为国家标准化管理委员会。
Scope
This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of arsine. This standard applies to arsine obtained from the reaction of arsenic compounds with acids. In the fabrication of semiconductor devices, arsine is used for doping and compound semiconductor epitaxy.

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