GB/T 15909-2017 in English

Introduction: Background and significance of the revision of the national standard for silane

GB/T 15909-2017 "Silane gas for electronic industry" is a technical standard for silane (SiH₄), a key material in the semiconductor industry. Its release marks the further improvement of my country's technical specifications in this field. Compared with the old version of the standard (GB/T15909-2009), the new version of the standard not only improves the purity requirement (from 99.99% to 99.9999%, volume fraction), but also expands the scope of application, adds standardized guidance on preparation methods, and provides stricter guarantees for the quality control of semiconductor materials.

Technical requirements: core indicators and purity control of silane

Table 1 shows the main technical indicators of silane gas, among which silane purity is the core requirement. Through strict impurity control, silane is ensured to be suitable for high-purity polysilicon preparation, chemical vapor deposition (CVD) process and other fields.

Test method: Impurity determination and safety regulations

Determination of impurities such as hydrogen, oxygen + argon, and nitrogen

The cutting injection method specified in GB/T 28726 is used, combined with gas chromatography (GC) and capillary column separation technology, to achieve accurate determination of impurities such as hydrogen, oxygen + argon, and nitrogen in silane. Among them:

• Pre-separation column: A 316L stainless steel tube about 5 meters long, filled with Porapak Q filler, used for the preliminary separation of hydrogen, oxygen + argon, and nitrogen.
• Chromatographic columns I and II are used to analyze components such as CO₂, CH₄, and C₂~C₄ hydrocarbons, respectively.

Determination of water content

According to GB/T5832.1 standard, the water content in silane is detected by electrolysis method, and the detection limit is 0.05×10⁻⁶ (volume fraction). This method ensures the accuracy of the measurement results by purging the system with high-purity nitrogen.

Determination of heavy metals and other elements

Inductively coupled plasma mass spectrometry (ICP-MS) is used, and the detection limit can reach 0.01 μg/L. This method ensures the accurate determination of heavy metals such as aluminum, antimony, and arsenic in silane by comparing with standard solutions and repeated sample testing.

Packaging, storage and transportation and safety regulations

Gas cylinder requirements

Silane gas should be stored in seamless steel cylinders that meet the GB/T5099 standard, and the DINV1632 interface is recommended. The filling factor is 0.3 kg/L to ensure safe storage and transportation.

Safety warnings and protection

Silane is a colorless, flammable gas at room temperature, and its lower auto-ignition limit is approximately 0.8×10⁻² (volume fraction). Operators should wear self-priming filter-type gas masks and anti-static work clothes, and stay away from fire sources and chemicals such as halogens.

Implementation suggestions and prospects

Manufacturers

Recommendations for silane manufacturers:

• Establish a strict quality control system to ensure that products meet the requirements of GB/T15909-2017.
• Use advanced analytical instruments (such as GC, ICP-MS) to detect impurities and heavy metals.
• Optimize the preparation process, reduce the introduction of impurities, and improve the purity of silane.

User end

Recommendations for users:

• Store and use silane gas in strict accordance with standard requirements, and avoid direct sunlight and high temperature environments.
• Regularly check the sealing of gas cylinders and interfaces to prevent leakage.
• Equip with necessary emergency equipment (such as explosion-proof fans, eyewash stations, etc.) to ensure safe operation.