GB/T 41326-2022 in English
VALIDHexafluorobutadiene
- Issued on:2022-03-09
- Implemented on:2022-10-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$243.00
《GB/T 41326-2022六氟丁二烯》由TC206（全国气体标准化技术委员会）归口，TC206SC3（全国气体标准化技术委员会含氟气体分会）执行，主管部门为中国石油和化学工业联合会。
Introduction
Analysis of the core content of the standard
GB/T41326-2022 stipulates the technical indicators and detection methods of hexafluorobutadiene (C4F6). Its purity requirement is ≥99.8%, and the key impurity controls include: moisture ≤0.001%, evaporation residue ≤0.005%, and acidity (measured in HCl) ≤0.002%.
Comparison of detection methods
| Detection items | Method standard | Key technical parameters | Allowance deviation |
|---|---|---|---|
| Main content | Gas chromatography | GS-GASPRO chromatographic column (60m×0.32mm) | ≤0.10% |
| Water | GB/T34237 | Karl Fischer Coulometry | ±5% |
| Acidity | GB/T33065 | Potentiometric titration | ±0.0005% |
Technology Evolution Analysis
This standard establishes a complete quality control system for hexafluorobutadiene for the first time. Compared with the international SEMI standard, it adds:
1. Detection requirements for gas phase non-condensable gases (≤1.5%)
2. Identification method for isomers such as 3-chloroheptafluoro-2-butene
3. Use bonded silica gel chromatographic columns to improve separation
Implementation suggestions
Application case of electronic special gas industry
Quality control process established by a semiconductor company in accordance with this standard:
- Adopting a GC-FID system with a split ratio of 50:1
- Establishing a database of 21 impurities
- After implementing the bottle-by-bottle inspection system for steel cylinders, the product yield rate increased by 12%
Safety operation specifications
Must pay attention to:
1. Explosion limit 7%-73% (volume fraction)
2. The filling coefficient is strictly controlled at 1.00kg/L
3. Emergency treatment of frostbite requires the use of 38-42℃ warm water
Loading PDF document...
Error loading PDF. Please make sure the file is valid and try again.
We also recommend
-
GB/T 44329-2024 in English
Preparation of gas mixtures—Gravimetric method
2024-08-23 -
GB/T 39708-2020 in English
Rhodium（Ⅲ） sulfate
2020-12-14 -
GB/T 15909-2017 in English
Gas for electronic industry―Silane
2017-05-31 -
GB/T 5275.2-2022 in English
Gas analysis—Preparation of calibration gas mixtures using dynamic methods—Part 2: Piston pumps
2022-12-30 -
GB/T 31058-2014 in English
Gases for electronic industry―Silicon tetrafluoride
2014-12-22 -
GB/T 36090-2018 in English
Gas analysis—Guide for quality assurance of on line automatic measuring system
2018-03-15 -
GB/T 33774-2017 in English
Gas for electronic industry-Propylene
2017-05-31 -
GB/T 28125.2-2020 in English
Gas analysis—Determination of hazardous materials in air separation process—Part 2:Determination of mineral oil
2020-11-19 -
GB/T 35528-2017 in English
Safety guidelines for cryogenic liquefied gases
2017-12-29
