GB/T 32650-2016 in English

VALID

Determining the content of trace elements in arenaceous quartz by inductively coupled plasma mass spectrometry(ICP-MS)

Issued on:2016-04-25
Implemented on:2016-11-01
File Format:PDF
Delivery:Via email within 1~3 business days

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Standard No:	GB/T 32650-2016
Document status:	VALID
Title in English:	Determining the content of trace elements in arenaceous quartz by inductively coupled plasma mass spectrometry(ICP-MS)
Title in Chinese:	电感耦合等离子质谱法检测石英砂中痕量元素
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2016-04-25
Implemented on:	2016-11-01
Professional Classification:	GB-National Standard
Related Keywords:	plasma mass spectrometry coupled plasma mass spectrometer trace elements various trace elements mass spectrometer
Related Topics:	Precursor ion peak in mass spectrum MS ionization voltage inductance Mass Spec + Precursor Ion Peak mass coupling Inductively Coupled Plasma Mass Spectrometry Inductive plasma mass spectrometer ion trap trace Trace detection method mass spectrometry field ionization Mass Spectrometry Ionization Species Bromine Mass Spectrometry plasma mass spectrometry Mass Spectrum Molecular Weight Quality Inspection Center Telephone Inductive coupling general purpose Ferrous inductive coupling ion pairs in mass spectrometry plasma mass spectrometry Quartz sand inspection report Precursor Ions in Mass Spectrometry Elemental Analysis Ions Plasma inductive coupling Three Inductive Coupling Element Molecular Weight Inductively Coupled Plasma Characterization Mass spectrometric detection of transitions Mass Spec Ion Hydrazine field ionization mass spectrometry Inductively Coupled Plasma plasma detection Inductively Coupled Plasma Mass Spectrometry Manganese mass spectrometry ion spectrum Inductive coupling detection mass spectrometer plasma Inductively Coupled Mass Spectrometry Lithium The molecular weight in the mass spectrum is more than 7 58 ions in the mass spectrum Mass Spectrum Molecular Weight 26 plasma mass spectrometry plasma coupling How to detect inductive coupling disk Inductively Coupled Plasma Rhodium Fe ion mass spectrometry Mass Spectrum Molecular Weight 43 Coupled inductor.co Determination of trace elements in water mass spec ion peak mass Detection of a small amount of deuterium as element Mass Spectrum Molecular Weight 36 Inductively Coupled Plasma Mass Spectrometry Mass spec b-ions Inductively Coupled Plasma Characterization element concentration in solution Detection of multiple elements in ore precursor ion mass British mass spectrometry English for mass spectrometry Deuterium content in water by mass spectrometry plasma coupled mass spectrometry ion mass spectrometry Ions in a mass spectrum Major ions in mass spectrometry Mid-spectrum detection+ Inductive Plasma Mass Spectrometry British mass spectrometer Quantity of product ions in mass spectrometry Detecting Transitions in Mass Spectrometry Mid-spectrum detection MS ionization voltage plasma mass spectrometry MS ion cluster atomic detection element ion mass spectrometry Element Energy Spectrum Mass Spectrum Peak Precursor Ion Ions in mass detection Ion Elemental Analysis Ion peaks in a mass spectrum Ore element detection Voltage ionization + mass spectrometry trace trace elements Measurement of Trace Elements by Mass Spectrometry Detection center ion Inductively Coupled Plasma Quartz Ion Hydrazine Mass Spectrometry trace detection Peptide + MS Ionization plasma detection Ore element detection Plasma coupled mass spectrometer Gold ore element detection Gold ore element detection Inductively Coupled Plasma Dual Mass Spectrometry Measure element method inductively coupled ions Induced ions Inductively coupled plasma Inductively coupled plasma Inductively Coupled Plasma Mass Spectrometry Sample Preparation Precursor ion peaks in mass spectra sub-mass detection Mass Spectrometry Precursor Ion Peak Uncoupled Inductor Ion source in mass spectrometry The molecular weight in the mass spectrum is more than 54 trace lead element Mass Spec + Precursor Ion Peak icpms inductively coupled plasma mass spectrometry Major Ions in Mass Spectrometry Mass Spectrometry Ion Detection Mass Spectrometry Primary Ionization ancient trace elements Separation of trace compounds Organic Mass Spectrometry Sodium Used ICP-MS MS coupled peaks 质谱中分子量多44 Atomic mass detection Elemental electron energy Ion Elemental Analysis Mass Spectrometry Ionization Technology Inductive coupling test Inductively Coupled Plasma Mass Spectrometry for Lead in Water Talc powder inductively coupled plasma mass spectrometry Dual Inductive Coupling Determination of 24 Elements in Soil by Inductively Coupled Plasma Mass Spectrometry Precursor ion mass for mass spectrometry Mass spectrometry detection sample volume Ion content in mass spectrometry Element Energy Spectrum molecular weight element Atomic element detection Element Molecular Weight Zhongrui Quartz Element detection in ore Inductively Coupled Ion Mass Spectrometry Trace elements and trace elements mass spectrometry ion element Inductively Coupled Ion Mass Spectrometry GBT32650 GB/T 32650-2016 CuTiTantalum Inductively Coupled Plasma Mass Spectrometry Inorganic Inductively Coupled Plasma Mass Spectrometry Mass spectrometry APCI ion source measures substance molecular weight +36 Inventor of mass spectrometry soft ionization Detection of Antibiotics by Ion Chromatography Inductively coupled plasma mass spectrometer won the bid Mass Spectrometry 4500 Split Ion Source In the mass spectrum if the mass of the precursor ion m1 and the product ion m2 PE inductively coupled plasma mass spectrometer won the bid Plasma assay for iron element The role of ion detectors in mass spectrometers Mass spectrometry soft ionization method Optocoupler component quality grade Ordinary quartz sand quality Trace Element Detection Methods Mass Spectrometry Pharmacopoeia Quartz sand carbon content detection method Trace substance detection Quartz sand testing Measurement method of rubidium in quartz sand Detection of elemental carbon in sludge Quartz sand impurity detection method Trace element calcium ion detection method Quartz sand detection method Phosphorus element standard mass spectrum Quartz sand acid resistance testing method Mass spectrometry detection Detection method of sodium in quartz sand Determination method of iron element in electronic grade quartz sand Trace test Element homogeneity test

《GB/T 32650-2016电感耦合等离子质谱法检测石英砂中痕量元素》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Introduction

1. Background and significance of the standard

GB/T32650-2016 standard is a detection method for trace elements in quartz sand, which uses inductively coupled plasma mass spectrometry (ICP-MS) for determination. This method is suitable for the quantitative analysis of various trace elements such as aluminum, calcium, iron, sodium, potassium, etc. in quartz sand, and provides an important technical basis for the quality control of semiconductor materials and related products.

2. Principle and technical route of the method

Inductively coupled plasma mass spectrometry (ICP-MS) is an efficient and sensitive elemental analysis technology. After the sample is digested with hydrofluoric acid and treated with nitric acid medium, it is introduced into the ion source through a nebulizer, and positively charged ions are formed through evaporation, dissociation, atomization and ionization.

The mass spectrometer separates ions according to the mass-to-charge ratio (m/z). The integrated area is proportional to the number of ions. The calibration curve is established through a standard series of solutions to achieve quantitative analysis of trace elements in the sample.

Inductively coupled plasma mass spectrometer (ICP-MS) consists of an ion source and a mass spectrometer and is the core equipment of this method.

3. Interference factors and solutions

The interference factors mainly include diatomic ions, polyatomic ions, matrix effects, background noise, and interactions between elements. In addition, the purity of reagents and the cleanliness of equipment will also affect the test results.

To reduce interference, the standard stipulates the use of high-purity reagents and strict control of laboratory environmental conditions (temperature 20℃±2℃, humidity 45%~55%, and air cleanliness of level 6 or above).

4. Comparison of standard frameworks

Standard requirements	GB/T32650-2016	Comparison with international standards
Scope of application	Determination of 13 trace elements in quartz sand	Basically consistent with ISO standard methods
Reagent requirements	Ultrapure water (resistivity ≥18MΩ·cm)	In line with international laboratory water standards
Analysis accuracy	Detection limit range: 0.3~7.0 ng/g	Better than some similar international methods

5. Implementation suggestions

Case analysis: Precautions in laboratory operation

Ensure that the instrument is calibrated regularly, especially the selection and adjustment of internal standard elements.
Strictly control the purity of reagents to avoid the introduction of external contamination.
Pay attention to the safe use of hydrofluoric acid during sample pretreatment. It is recommended to operate in a fume hood.

More samples: DL/T 5154-2012 GB 18306-2015 QC/T 942-2021

Sample only — not a preview of GB/T 32650-2016

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