GB/T 33140-2016 in English
VALIDPhosphorized copper anode used for integrated circuit
- Issued on:2016-10-13
- Implemented on:2017-09-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$156.00
《GB/T 33140-2016集成电路用磷铜阳极》由TC243(全国有色金属标准化技术委员会)归口,TC243SC2(全国有色金属标准化技术委员会重金属分会)执行,主管部门为中国有色金属工业协会。
Introduction
In-depth analysis of the national standard for phosphor copper anodes for integrated circuits
1. Background and significance of standard formulation
With the rapid development of the integrated circuit industry, phosphor copper anodes are key electroplating materials, and their performance directly affects the quality and efficiency of semiconductor manufacturing. In order to standardize industry standards and ensure product quality and technical consistency, "GB/T33140-2016 Phosphor Copper Anodes for Integrated Circuits" came into being. This standard is managed by the National Technical Committee for Standardization of Nonferrous Metals, filling the gap in the field of high-purity phosphor copper materials in China.
2. Standard Framework and Main Contents
| Chapter | Content Overview | Key Indicators |
|---|---|---|
| Scope (Chapter 1) | Specifies the requirements and test methods for phosphor copper anodes. | Applicable to all types of phosphor copper anode products for integrated circuits |
| Normative References (Chapter 2) | List all necessary reference standards. | GB/T3177, YB/T922, etc. |
| Terms and Definitions (Chapter 3) | Clarifies the definitions of key terms. | Phosphor copper anode: Anode material used in electroplating process |
| Requirements (Chapter 4) | Includes detailed provisions on product classification, brand and chemical composition. | Chemical composition: Cu + P mass fraction is not less than 99.95% |
3. Technology evolution and application cases
The application of phosphor copper anode is mainly concentrated in the electroplating process in semiconductor manufacturing. With the improvement of chip integration, the requirements for material purity and grain size are becoming increasingly stringent. For example, in advanced processes, the average grain size of 150μm~450μm can effectively reduce coating defects and improve electroplating uniformity.
Case Analysis: The Practice of a High-end Chip Manufacturer
By adopting phosphor copper anodes that meet the GB/T33140 standard, the manufacturer has significantly improved the quality and consistency of the coating. The chemical composition is controlled at Cu + P mass fraction ≥ 99.99%, and the impurity content is strictly limited to ≤10×10^-4.
4. Implementation Suggestions and Future Outlook
- Both the supply and demand parties should strictly inspect and accept according to the standards to ensure product quality.
- It is recommended that enterprises establish a complete quality traceability system to achieve full-process monitoring from raw materials to finished products.
- In the future, with technological advances, phosphor copper anodes will develop towards higher purity and better grain size.

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