GB/T 34091-2017 in English
VALIDGas for electronic industry-Hexafluoroethane
- Issued on:2017-07-31
- Implemented on:2017-11-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$117.00
| Standard No: | GB/T 34091-2017 |
| Document status: | VALID |
| Title in English: | Gas for electronic industry-Hexafluoroethane |
| Title in Chinese: | 电子工业用气体 六氟乙烷 |
| Language: | English |
| File Format: | Electronic (PDF) |
| Delivery: | Via email within 1~3 business days |
| Issued on: | 2017-07-31 |
| Implemented on: | 2017-11-01 |
| ICS Classification: | 71.100.20-Gases for industrial application |
| Chinese Classification: | G86-Industrial gas and chemical gas |
| Professional Classification: | GB-National Standard |
| Related Topics: | fluorine
electronics industry Industrial Gases six six six pillars electronics industry Six rank e-mail industrial gas bar indium ethane industrial gas CHH gas phase Industrial Aluminum Gas GBT34091 GB/T 34091-2017 Gases for the electronics industry Ethane industry feedstock requirements Six factors of atmosphere Ethane corporate standards Ethane oil Gases for Electronics Industry International Ethane industry Fluoride ion industry gb/t 34091-2017 |
《GB/T 34091-2017电子工业用气体 六氟乙烷》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
Introduction
Introduction and Standard Background
The National Standard of the People's Republic of China GB/T 34091-2017 "Hexafluoroethane Gas for Electronic Industry" is a technical standard formulated to regulate the application of hexafluoroethane in the electronics industry. This standard was proposed by the National Technical Committee for Standardization of Semiconductor Equipment and Materials and is applicable to high-purity hexafluoroethane products after refining and purification.
Comparison of standard frameworks
| Dimensions | Technical requirements | Test methods | Scope of application |
|---|---|---|---|
| Purity index | Hexafluoroethane purity ≥99.999% | Chromatographic analysis method specified in GB/T 28726 | Electronic industry etching process |
| Impurity content | The total amount of impurities such as hydrogen, oxygen + argon ≤10ppm | Multi-stage chromatography separation and titration method | High purity gas preparation |
| Moisture control | Moisture content ≤2ppm | Electrolytic determination | Semiconductor manufacturing environment |
Detailed explanation of technical requirements
The technical indicators of hexafluoroethane are the key to ensuring its efficient application in the electronics industry. According to Table 1, the purity of hexafluoroethane must reach 99.999% (volume fraction), and the content of various impurities such as hydrogen, oxygen + argon, and nitrogen are strictly limited.
For example, the moisture content in hexafluoroethane is controlled at ≤2ppm, which requires the use of efficient drying technology during the production process. In addition, the acidity index in terms of HF must be ≤0.1ppm (mass fraction) to ensure that the product will not corrode the equipment during use.
Test methods and implementation advice
Sampling and determination
According to GB/T 3723, the sampling of hexafluoroethane must ensure safety. Each batch of products should be tested for key indicators, such as purity and impurity content, and acidity should be sampled in proportion.
Instrument calibration and operation
During the analysis, calibrated chromatographic columns (such as Porapak ΔQ and Al₂O₃ capillary columns) must be used to ensure data accuracy. It is recommended to check the performance of the equipment regularly and keep calibration records.
Packaging and storage
According to GB/T5099, it is recommended to use gas cylinders with treated inner surfaces, and the filling coefficient should be selected according to the pressure level (1.06 kg/L at 12.5 MPa). The product should be accompanied by a quality certificate and marked with necessary information.
Safety Precautions
Although hexafluoroethane is inert at room temperature, you still need to pay attention to its potential hazards. Avoid high temperatures and open flames during storage, and it is recommended to wear protective equipment during use to prevent frostbite or inhalation risks.

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