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GB/T 34091-2017 in English

GB/T 34091-2017 in English

VALID

Gas for electronic industry-Hexafluoroethane

  • Issued on:2017-07-31
  • Implemented on:2017-11-01
  • File Format:PDF
  • Delivery:Via email within 1~3 business days
Price(USD): $120.00
$117.00
Standard No: GB/T 34091-2017
Document status: VALID
Title in English: Gas for electronic industry-Hexafluoroethane
Title in Chinese: 电子工业用气体 六氟乙烷
Language: English
File Format: Electronic (PDF)
Delivery: Via email within 1~3 business days
Issued on: 2017-07-31
Implemented on: 2017-11-01
ICS Classification: 71.100.20-Gases for industrial application
Chinese Classification: G86-Industrial gas and chemical gas
Professional Classification: GB-National Standard
Related Topics: fluorine
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gb/t 34091-2017

《GB/T 34091-2017电子工业用气体 六氟乙烷》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。


Introduction

Introduction and Standard Background

The National Standard of the People's Republic of China GB/T 34091-2017 "Hexafluoroethane Gas for Electronic Industry" is a technical standard formulated to regulate the application of hexafluoroethane in the electronics industry. This standard was proposed by the National Technical Committee for Standardization of Semiconductor Equipment and Materials and is applicable to high-purity hexafluoroethane products after refining and purification.

Comparison of standard frameworks

Dimensions Technical requirements Test methods Scope of application
Purity index Hexafluoroethane purity ≥99.999% Chromatographic analysis method specified in GB/T 28726 Electronic industry etching process
Impurity content The total amount of impurities such as hydrogen, oxygen + argon ≤10ppm Multi-stage chromatography separation and titration method High purity gas preparation
Moisture control Moisture content ≤2ppm Electrolytic determination Semiconductor manufacturing environment

Detailed explanation of technical requirements

The technical indicators of hexafluoroethane are the key to ensuring its efficient application in the electronics industry. According to Table 1, the purity of hexafluoroethane must reach 99.999% (volume fraction), and the content of various impurities such as hydrogen, oxygen + argon, and nitrogen are strictly limited.

For example, the moisture content in hexafluoroethane is controlled at ≤2ppm, which requires the use of efficient drying technology during the production process. In addition, the acidity index in terms of HF must be ≤0.1ppm (mass fraction) to ensure that the product will not corrode the equipment during use.

Test methods and implementation advice

Sampling and determination

According to GB/T 3723, the sampling of hexafluoroethane must ensure safety. Each batch of products should be tested for key indicators, such as purity and impurity content, and acidity should be sampled in proportion.

Instrument calibration and operation

During the analysis, calibrated chromatographic columns (such as Porapak ΔQ and Al₂O₃ capillary columns) must be used to ensure data accuracy. It is recommended to check the performance of the equipment regularly and keep calibration records.

Packaging and storage

According to GB/T5099, it is recommended to use gas cylinders with treated inner surfaces, and the filling coefficient should be selected according to the pressure level (1.06 kg/L at 12.5 MPa). The product should be accompanied by a quality certificate and marked with necessary information.

Safety Precautions

Although hexafluoroethane is inert at room temperature, you still need to pay attention to its potential hazards. Avoid high temperatures and open flames during storage, and it is recommended to wear protective equipment during use to prevent frostbite or inhalation risks.

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