GB/T 38518-2020 in English

Analysis of the core content of the standard

This standard innovatively uses the combined technology of argon ion beam polisher and scanning electron microscope to solve the deformation problem caused by mechanical polishing of flexible substrates. The main technological breakthroughs are reflected in:

Key technical implementation points

1. Sample preparation specifications

For organic coatings that require evaporation of a 50nm metal protective layer, the embedding resin should meet the following requirements:

• Curing shrinkage <0.5%
• Thermal stability >80℃
• Hardness ≥80HRB

2. Argon ion polishing parameters

Key parameter combination recommendations:

Measurement uncertainty control

According to formula (2), there are three major factors affecting the uncertainty:

1. Standard sample error: It is recommended to use CNAS certified standard film
2. Equipment resolution: SEM secondary electron image needs to be <3nm
3. Number of measurements: Must be ≥25 times to take the average

Standard Evolution Analysis

Compared with GB/T 20307-2006 Main improvements:

• Added special treatment requirements for flexible substrates
• Clarified argon ion polishing process parameters
• Detailed organic coating protection measures
• Improved uncertainty calculation formula

Implementation suggestions

The laboratory should establish:

• Sample preparation SOP document
• Equipment status inspection form
• Standard sample traceability record
• Two-person system for data review