GB/T 39159-2020 in English

VALID

High purity copper alloy target for integrated circuit

Issued on:2020-11-19
Implemented on:2021-10-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $190.00
$185.00

Standard No:	GB/T 39159-2020
Document status:	VALID
Title in English:	High purity copper alloy target for integrated circuit
Title in Chinese:	集成电路用高纯铜合金靶材
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2020-11-19
Implemented on:	2021-10-01
ICS Classification:	77.150.30-Copper products
Chinese Classification:	H62-Heavy metals and their alloys
Professional Classification:	GB-National Standard
Related Keywords:	high purity copper alloy target standards indicator category cual alloy cumn alloy purity requirement material property comparison cual alloy target alloy integrated circuit introduction core technical requirements
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《GB/T 39159-2020集成电路用高纯铜合金靶材》由TC243（全国有色金属标准化技术委员会）归口，TC243SC2（全国有色金属标准化技术委员会重金属分会）执行，主管部门为中国有色金属工业协会。

Introduction

Core Technical Requirements of Standards

Indicator Category	CuAl alloy	CuMn alloy
Purity requirement	≥99.9999%(Cu+Al)	≥99.9999%(Cu+Mn)
Key impurity control	Ag≤0.3ppm, Fe≤0.2ppm	Ag≤0.3ppm, Fe≤0.2ppm
Grain size(μm)	Average value <50, maximum value <100	Ultrafine grain ≤5 (special process required)

Material property comparison

CuAl alloy target has better conductivity and thermal stability, and is suitable for process nodes below 90nm; while CuMn alloy target can improve film stress by adding manganese, and performs well in 3D NAND memory devices.

Key points for implementation

Welding process control: Diffusion welding bonding rate must be ≥99%, and unwelded area ≤0.5%
Grain detection: Use EBSD method (GB/T 36165) to detect ultrafine grain structure
Surface treatment: Mirror processing requirement of Ra≤0.8μm

Technology evolution

This standard incorporates glow discharge mass spectrometry (YS/T 922) into the impurity detection method for the first time, and the detection limit reaches 10^-7, which is two orders of magnitude higher than traditional ICP-MS.

More samples: GB 18306-2015 GB 50021-2001(2009) QC/T 942-2021

Sample only — not a preview of GB/T 39159-2020

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