GB/T 4061-1983 in English

SUPERSEDED

Polycrystalline silicon--Examination method--Assessment of sandwiches on cross-section by chemical corrosion

Issued on:1983-01-02
Implemented on:1984-01-02
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $180.00
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Standard No:	GB/T 4061-1983
Document status:	SUPERSEDED
Superseded by:	GB/T 4061-2009 Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion
Superseded on:	2010-06-01
Title in English:	Polycrystalline silicon--Examination method--Assessment of sandwiches on cross-section by chemical corrosion
Title in Chinese:	硅多晶断面夹层化学腐蚀检验方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	1983-01-02
Implemented on:	1984-01-02
ICS Classification:	77.040.30-Chemical analysis of metals
Chinese Classification:	H25-Metal chemical property test method
Professional Classification:	GB-National Standard
Related Keywords:	polycrystalline silicon silicon tetrachloride thin silicon cores polycrystalline rods silicon
Related Topics:	section Chemical Silicon Detection Polycrystalline chemical corrosion gb/t3736.1-1983 GB/T 3762-1983 How long does method validation take lattice layer GB/T 3641-1983 facet method GB/T 4113-1983 crystal facet Electrochemical detection Mezzanine Crystal etch instrument chemical corrosion GBT4061 GB/T 2477-1983 GB/T 2483-1983 GB/T 2900.34-1983 GB/T 2900.37-1983 GBT3256.8-1983 GBT3483-1983 GBT3488-1983 GBT3493-1983 GB/T 3496-1983 GB/T 3501-1983 GB/T 3502-1983 GB/T 3556-1983 GB/T 3567-1983 GB/T 3609.3-1983 GB/T 3626-1983 GBT3627-1983 GB/T 3631-1983 GB/T 3641-1983 GB/T 3642-1983 GB/T 3653.2-1983 GB/T 3653.5-1983 GB/T 3654.7-1983 GBT3657-1983 GB/T 3692-1983 GBT3717-1983 GBT3731-1983 GB/T 3733.1-1983 GB/T 3733.2-1983 GB/T 3734.1-1983 GB/T 3734.2-1983 GB/T 3735.1-1983 GB/T 3735.2-1983 GB/T 3736.1-1983 GB/T 3736.2-1983 GB/T 3737.1-1983 GB/T 3737.2-1983 GB/T 3738.1-1983 GB/T 3738.2-1983 GB/T 3739.1-1983 GB/T 3739.2-1983 GB/T 3740.1-1983 GB/T 3740.2-1983 GB/T 3741.1-1983 GB/T 3741.2-1983 GB/T 3742.1-1983 GB/T 3742.2-1983 GB/T 3743.1-1983 GB/T 3743.2-1983 GB/T 3744.1-1983 GB/T 3744.2-1983 GB/T 3745.1-1983 GB/T 3745.2-1983 GB/T 3746.1-1983 GB/T 3746.2-1983 GB/T 3747.1-1983 GB/T 3747.2-1983 GB/T 3748.1-1983 GB/T 3748.2-1983 GB/T 3749.1-1983 GB/T 3749.2-1983 GB/T 3750.1-1983 GB/T 3750.2-1983 GB/T 3750.3-1983 GB/T 3751.1-1983 GB/T 3751.2-1983 GB/T 3752.1-1983 GB/T 3752.2-1983 GB/T 3753.1-1983 GB/T 3753.2-1983 GB/T 3754.1-1983 GB/T 3754.2-1983 GB/T 3755.1-1983 GB/T 3755.2-1983 GB/T 3756.1-1983 GB/T 3756.2-1983 GB/T 3757.1-1983 GB/T 3757.2-1983 GB/T 3758.1-1983 GB/T 3758.2-1983 GBT3761-1983 GB/T 3762-1983 GBT3771-1983 GB/T 3780.13-1983 GB/T 3780.16-1983 GBT3794-1983 GBT3813-1983 GBT3814-1983 GB/T 3815-1983 GB/T 3816-1983 GBT3825-1983 GB/T 3847-1983 GBT3849-1983 GB/T 3885.10-1983 GB/T 3885.11-1983 GB/T 3885.1-1983 GB/T 3885.12-1983 GB/T 3885.2-1983 GB/T 3885.3-1983 GB/T 3885.4-1983 GB/T 3885.5-1983 GB/T 3885.6-1983 GB/T 3885.7-1983 GBT3885.8-1983 GB/T 3885.9-1983 GB/T 3907-1983 GB/T 3908-1983 GB/T 3909-1983 GB/T 3925-1983 GB/T 3936.7-1983 GB/T 3948-1983 GB/T 3951-1983 GB/T 3969-1983 GB/T 3990-1983 GB/T 3991-1983 GB/T 3992-1983 GB/T 3993-1983 GB/T 3998-1983 GB/T 4022-1983 GB/T 4061-1983 GB/T 4061-2009 GB/T 4064-1983 GB/T 4077-1983 GB/T 4080-1983 GB/T 4087.1-1983 GB/T 4087.2-1983 GB/T 4090-1983 GB/T 4102.10-1983 GB/T 4102.11-1983 GB/T 4102.1-1983 GB/T 4102.12-1983 GB/T 4102.2-1983 GB/T 4102.3-1983 GB/T 4102.4-1983 GB/T 4102.5-1983 GB/T 4102.6-1983 GB/T 4102.7-1983 GB/T 4102.8-1983 GB/T 4102.9-1983 GB/T 4105-1983 GB/T 4106-1983 GB/T 4112-1983 GB/T 4113-1983 GB/T 4114-1983 GB/T 4115-1983 GB/T 4116-1983 GBT558-1983 GB/T3733.2-1983 GB/T3737.1-1983 gb/t3738.1-1983 Judgment of corrosiveness of chemical products Inspection methods for metal single crystals and polycrystals Electrochemical preparation of amorphous How to judge the level of electric potential Chemistry Chemical methods for testing magnesium Crystalline silicon detection method Chemical methods of lake surface treatment Crystal Form Methodology How to judge chemical equations What methods are included in the dry chemical method? gbt4061-2022 gb/t 3631-1983 gb/t 1983 gb/t 3794-1983

《GB/T 4061-1983硅多晶断面夹层化学腐蚀检验方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准适用于三氯氢硅及四氯化硅氢还原在细硅芯上沉积硅多晶所生长出来的硅多晶棒。

Scope

This standard is applicable to silicon polycrystalline rods grown by hydrogen reduction of trichlorosilane and silicon tetrachloride to deposit polycrystalline silicon on thin silicon cores.

More samples: NB/T 47013.2-2015 GB 18306-2015 JJG 21-2008

Sample only — not a preview of GB/T 4061-1983