GB/T 43771-2024 in English
VALIDElectronic gas—Carbon monoxide
- Issued on:2024-03-15
- Implemented on:2024-10-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$233.00
《GB/T 43771-2024电子气体 一氧化碳》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC1(全国半导体设备和材料标准化技术委员会气体分会)执行,主管部门为国家标准化管理委员会。
Introduction
Standard formulation background and technology evolution analysis
This standard was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203), which fully reflects the in-depth participation and practical experience of industry experts. The background of the formulation of the standard is mainly aimed at the high purity requirements of gases used in the electronics industry, especially in the purification and preparation of carbon monoxide, which needs to meet the strict requirements of semiconductor and other industries for gas purity and impurity control.
Comparative Analysis of Technical Requirements
| Item | Indicator | Unit |
|---|---|---|
| Carbon Monoxide (CO) Purity (Mole Fraction) | ≥99.999 | /10-2 |
| Hydrogen (H₂) Content | ≤0.5 | /10-6 |
| (Oxygen + Argon) (O₂+Ar) Content | ≤2.0 | /10-6 |
| Nitrogen (N₂) content | ≤3.0 | /10-6 |
| Carbon dioxide (CO₂) content | ≤2.0 | /10-6 |
Test methods and equipment requirements
Chromatographic column configuration:A stainless steel tube about 3 meters long is used, and a high molecular polymer with a particle size of 0.18mm~0.25mm is used as the separation medium. This configuration is suitable for the efficient separation of impurity components such as hydrogen, oxygen+argon, nitrogen and carbon dioxide.
Detector:A hydrogen flame ionization detector (FID) and a flame photometric detector (FPD) are used for the determination of total hydrocarbon and total sulfur content, respectively. These devices need to be calibrated regularly to ensure measurement accuracy.
Implementation suggestions
- Equipment selection:It is recommended to use aluminum alloy seamless gas cylinders that meet the requirements of GB/T11640 and equipped with pressure vessel safety accessories.
- Staff training:Operators need to receive professional training and be familiar with the dangerous characteristics of gases and emergency treatment measures.
- Storage management:It is recommended to use a cool, dry, ventilated dedicated warehouse equipped with a leak monitoring and alarm system.

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