GB/T 45767-2025 in English
VALIDSilicon nitride ceramic subtrates
- Issued on:2025-06-30
- Implemented on:2026-01-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$262.00
| Standard No: | GB/T 45767-2025 |
| Document status: | VALID |
| Title in English: | Silicon nitride ceramic subtrates |
| Title in Chinese: | 氮化硅陶瓷基片 |
| Language: | English |
| File Format: | Electronic (PDF) |
| Delivery: | Via email within 1~3 business days |
| Issued on: | 2025-06-30 |
| Implemented on: | 2026-01-01 |
| ICS Classification: | 81.060.30-Advanced ceramics |
| Chinese Classification: | Q32-Special ceramics |
| Professional Classification: | GB-National Standard |
| Related Topics: | cubic silicon nitride
ceramic base nitrogen methylation Silicon ceramics Mesoporous ceramic sheet Nitride ceramic Silicon-based device Nitride ceramics Silicon nitride ceramic substrate group |
《GB/T 45767-2025氮化硅陶瓷基片》由TC194（全国工业陶瓷标准化技术委员会）归口，主管部门为中国建筑材料联合会。
Introduction
Technological evolution and standard background of silicon nitride ceramic substrates
As a key packaging material for third-generation semiconductors, silicon nitride ceramic substrates have established a complete technical system for the first time in the 2025 version of the national standard. Compared with the GB/T 39975-2021 aluminum nitride substrate standard, this document highlights the following innovations:
| Comparison Dimensions | Aluminum Nitride Substrate | Silicon Nitride Substrate |
|---|---|---|
| Thermal Conductivity Range | 170-230W/(m·K) | 60-120W/(m·K) |
| Flexural Strength | ≥300MPa | ≥550MPa |
| Coefficient of thermal expansion (×10-6/K) | 4.5-5.5 | 2.43-2.97 |
Interpretation of core performance indicators
Analysis of key parameters of clause 5.3
The standard divides products into 4 categories (SN60/80/100/120) according to thermal conductivity, and the performance gradient change law is as follows:
Typical case: When SN80 substrate is used in electric vehicle IGBT module, it must meet the following requirements at the same time:
- Volume density ≥3.10g/cm3
- Three-point bending strength ≥700MPa
- No cracks after 30 times of 600℃ water cooling thermal shock
Key points of innovation in detection methods
6.8 Indentation fracture resistance test
This standard pioneered the introduction of the indentation method for fracture toughness testing. The key technical requirements include:
- Indentation spacing ≥ 5 times the crack diagonal length
- Number of effective indentations ≥ 5
- A test force of 29.42N is required for 0.18mm thin sheets
Implementation recommendations
Enterprise compliance path
For clause 7.4 of the standard, manufacturers are advised to:
| Inspection type | Critical control point | Sampling plan |
|---|---|---|
| Factory inspection | Surface roughness Ra≤0.7μm | GB/T 2828.1 S-2 |
| Type inspection | Weibull modulus>10 | 10 samples with zero defects |
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