YS/T 791-2012 in English
VALIDPlatinum Target
- Issued on:2012-11-07
- Implemented on:2013-03-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$127.00
本标准规定了铂靶的要求、试验方法、检验规则和标志、包装、运输、贮存及合同或订货单。
本标准适用于半导体器件用的各类铂溅射靶材,其他用途的铂靶材也可参照使用。
Scope
This standard specifies the requirements, test methods, inspection rules and marking, packaging, transportation, storage and contracts or order orders for platinum targets. This standard applies to various types of platinum sputtering targets for semiconductor devices (hereinafter referred to as platinum targets). Platinum targets for other purposes can also be used with reference.

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