YS/T 937-2013 in English
VALIDNickel-platinum Target
- Issued on:2013-10-17
- Implemented on:2014-03-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$321.00
Scope
This standard specifies the requirements, test methods, inspection rules and markings, packaging, transportation, storage, quality certificate and contract (or order) content of nickel-platinum targets. This standard applies to various types of nickel-platinum targets used for semiconductor thin films.

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