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Database: 365,228(8 Aug 2026)

Ultrapure Water Standard

Ultrapure Water Standard, Total:24 items.

The international standard classification for "Ultrapure Water Standard" includes: .

The Chinese standard classification for "Ultrapure Water Standard" includes: .


Taiwan Provincial Standard of the People's Republic of China

  • CNS 14642-2002 Methods of test for anions in highly purified water
  • CNS 14641-2002 Methods of test for silica in highly purified water
  • CNS 14638-2002 Methods of test for total organic carbon in highly purified water
  • CNS 14640-2002 Methods of test for metallic elements in highly purified water
  • CNS 14639-2002 Methods of test for electric conductivity in highly purified water

Group Standards of the People's Republic of China

  • T/DE 10-2022 Technical specifications for laboratory ultrapure water centralized water supply system
  • T/ZGM 011-2023 Technical requirements for product certification of ultrafiltration membrane module for ultrapure water in the semiconductor industry

International Association of Plumbing and Mechanical Officials

American Society of Safety Engineers

Semiconductor Equipment and Materials International (SEMI)

  • SEMI F63-0701-2001 Guidelines for Ultrapure Water Used in Semiconductor Processing
  • SEMI F61-0521-2021 Guide for Design and Operation of a Semiconductor Ultrapure Water System
  • SEMI F75-0521-2021 Guide for quality monitoring of ultrapure water used in semiconductor manufacturing

Korean Agency for Technology and Standards (KATS)

  • KS I 3213-2009 Testing methods for concentration of fine particles in highly purified water

American Society for Testing and Materials (ASTM)

  • ASTM D4453-02 Standard Practice for Handling of Ultra-Pure Water Samples
  • ASTM D4453-02(2006) Standard Practice for Handling of Ultra-Pure Water Samples
  • ASTM D5127-13(2018) Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
  • ASTM D5127-07 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
  • ASTM D5127-99 Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
  • ASTM D5127-12 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
  • ASTM D5127-13 Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

Association of German Mechanical Engineers