DB31/ 506-2020 in English

本文件规定了集成电路晶圆制造过程的单位产品能源消耗（以下简称能耗)限额的技术要求、统计范围、计算方法、节能管理与措施。
本文件适用于集成电路晶圆制造企业单位产品能耗的计算与考核，以及对新建及改扩建项目的能耗控制。
本文件不适用于12英寸40 nm及以下工艺制程的集成电路制造企业

Scope

This document specifies the technical requirements, statistical scope, calculation method, energy-saving management and measures for the energy consumption per unit product (hereinafter referred to as energy consumption) limit of the integrated circuit wafer manufacturing process. This document applies to the calculation and assessment of the energy consumption per unit product of integrated circuit wafer manufacturing enterprises, as well as the energy consumption control of new construction and renovation and expansion projects. This document does not apply to integrated circuit manufacturing enterprises with 12-inch 40 nm and below process technology.