GB/T 11069-2017 in English
VALIDHigh purity germanium dioxide
- Issued on:2017-10-14
- Implemented on:2018-05-01
- File Format:PDF
- Delivery:Within 1 day
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《GB/T 11069-2017高纯二氧化锗》由TC203(全国半导体设备和材料标准化技术委员会)、全国有色金属标准化技术委员会联合归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
Introduction
National Standard of the People's Republic of China GB/T 11069—2017 High Purity Germanium Dioxide
Background and Significance of Standard Revision
GB/T 11069—2017 High Purity Germanium Dioxide is the latest national standard formulated for high purity germanium dioxide products, replacing the original GB/T 11069—2006 version. The new standard has made a number of technical updates and content revisions on the original basis, mainly involving chemical composition requirements, test methods and quality inspection rules.
With the development of the semiconductor industry, the demand for high purity germanium dioxide continues to increase, and higher requirements are placed on product quality and technical indicators. The revision of this standard aims to meet market demand, enhance product competitiveness, and provide an important basis for standardized production in related industries.
| Project | GB/T 11069—2006 | GB/T 11069—2017 |
|---|---|---|
| Grade classification | GeO2-05, GeO2-06 | New GeO2-05, Retain GeO2-06 |
| Impurity content requirements | - | Increase restrictions on elements such as Ca and Mg |
| Testing methods | Determination of volatile matter is not specified | |
| Added appendix content | - | Added determination methods of volatile matter and bulk density (Appendix A, B) |
Chemical composition and physical performance requirements
The chemical composition of high-purity germanium dioxide is its core quality indicator, which is mainly reflected in the impurity content and purity level. According to Table 1, the purity of GeO2-06 grade reaches 99.9999%, while that of GeO2-05 grade is 99.999%.
The newly added determination method of volatile matter (Appendix A) adopts the muffle furnace high temperature burning method to ensure the accuracy of the test results. At the same time, the determination of bulk density (Appendix B) is completed by a combination of electronic balance and glass measuring cylinder, and the measurement accuracy reaches 0.1g.
Test methods and quality inspection
The standard stipulates a number of testing indicators, including impurity content, chlorine content, volatile matter, moisture, electrical properties, etc. Among them:
- Impurity content is determined by YS/T 37.2 and YS/T 37.4 methods
- Chlorine content is determined according to YS/T 37.1 standard
- Added Appendix A for volatile matter determination, using muffle furnace high temperature calcination method
Technological evolution and application fields
Compared with the 2006 version, the 2017 version of the standard mainly adds the following contents:
| New/revised content | Specific description |
|---|---|
| Chemical analysis method | GB/T6284 and GB/T26074 are added as normative reference documents |
| Particle size requirement | Adjusted from 95% to 97%, and a new loose density index (1.3~2.0g/cm³) was added |
| Optimization of detection method | Volatile matter and moisture determination adopt Appendix A and B respectively to improve detection efficiency |
Implementation suggestions and precautions
To ensure the effective implementation of the standard, it is recommended that:
- Enterprises should be equipped with advanced testing equipment, such as muffle furnaces, analytical balances and glass measuring cylinders.
- Sampling should be carried out strictly in accordance with the sampling method specified in the standard to avoid deviations in test results due to improper sampling.
- Strengthen personnel training to ensure that technical personnel are familiar with the revised content and technical requirements of the new standard.

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