GB/T 14600-2009 in English
SUPERSEDEDGas for electronic industry - Nitrous Oxide
- Issued on:2009-10-30
- Implemented on:2010-05-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$156.00
《GB/T 14600-2009电子工业用气体 氧化亚氮》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC1(全国半导体设备和材料标准化技术委员会气体分会)执行,主管部门为国家标准化管理委员会。
本标准规定了氧化亚氮的技术要求,试验方法以及包装、标志、贮运及安全。
本标准适用于电子工业中化学气相淀积工艺。
Scope
This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of nitrous oxide. This standard applies to chemical vapor deposition processes in the electronics industry.

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