GB/T 16945-1997 in English
SUPERSEDEDGases for electronic industry--Argon
- Issued on:1997-08-13
- Implemented on:1998-05-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$214.00
《GB/T 16945-1997电子工业用气体 氩》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了电子工业用氩的技术要求、试验方法和包装、标志。本标准适用于以深冷法从空气、合成氨尾气中提取的液态氩和气态氩。
Scope
This standard specifies the technical requirements, test methods, packaging and marking of argon used in the electronics industry. This standard applies to liquid argon and gaseous argon extracted from air and synthetic ammonia tail gas by cryogenic method. Argon is used in the electronics industry for purging, protection and pressurization of the system. It can also be used in different processes such as chemical vapor deposition, sputtering, plasma and active ion etchant and annealing. Molecular formula: Ar Relative molecular mass: 39.948 (according to the international relative atomic mass in 1991)

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