GB/T 31986-2015 in English

《GB/T 31986-2015电子工业用气体 八氟丙烷》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了八氟丙烷的技术要求、试验方法、包装、标志、贮运和安全。
本标准适用于六氟丙烯或七氟丙烷氟化制备,并通过精馏、吸附、催化等工艺提纯的八氟丙烷产品,以及碳和氟直接反应法合成的八氟丙烷产品。它在电子工业等离子蚀刻工艺中作为蚀刻气体或清洗气体。
分子式:C3F8。
相对分子质量:188.017(按2011年国际相对原子质量)。

Scope

This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of octafluoropropane. This standard applies to octafluoropropane products prepared by fluorination of hexafluoropropene or heptafluoropropane and purified by distillation, adsorption, catalysis and other processes, as well as octafluoropropane products synthesized by direct reaction of carbon and fluorine. It is used as etching gas or cleaning gas in plasma etching process of electronics industry. Molecular formula: C₃F₈. Relative molecular mass: 188.017 (according to the international relative atomic mass in 2011).