GB/T 18193-2000 in English
VALIDVacuum technology - Mass-spectrometer-type leak detector calibration
- Issued on:2000-09-26
- Implemented on:2001-02-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$204.00
《GB/T 18193-2000真空技术 质谱检漏仪校准》由TC18(全国真空技术标准化技术委员会)归口,主管部门为中国机械工业联合会。
本标准规定了质谱检漏仪的校准程序。它仅适用于校准将灵敏件处于高真空系统中的检漏仪。因此这个方法没有制订完整的验收试验。本标准规定探索气体使用氦-4。但在适当的预防措施下,可以使用其他探索气体,如氩-40。本标准的应用受到检漏仪不能测定小于10-12Pa・m3・s-1漏率漏孔限制。本标准程序提出了测定最小可检漏率和最小可检浓度比的两个要点。它分别应用于高真空和压力大于一个大气压的检漏仪上。
Scope
This standard specifies the calibration procedure for mass spectrometer leak detectors. It is only suitable for calibrating leak detectors that place sensitive components in high vacuum systems. Therefore this method does not develop a complete acceptance test. This standard specifies the use of helium-4 as an exploration gas. But with proper precautions, other exploration gases such as argon-40 can be used. The application of this standard is limited by the fact that the leak detector cannot measure leaks with a leak rate less than 10

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