GB/T 20175-2006 in English

SUPERSEDED

Surface chemical analysis-Sputter depth profiling-Optimization using layered systems as reference materials

Issued on:2006-03-27
Implemented on:2006-11-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $190.00
$185.00

Standard No:	GB/T 20175-2006
Document status:	SUPERSEDED
Superseded by:	GB/T 20175-2025 Surface chemical analysis—Sputter depth profiling—Optimization using layered systems as reference materials
Superseded on:	2026-01-01
Title in English:	Surface chemical analysis-Sputter depth profiling-Optimization using layered systems as reference materials
Title in Chinese:	表面化学分析溅射深度剖析用层状膜系为参考物质的优化方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2006-03-27
Implemented on:	2006-11-01
ICS Classification:	71.040.40-Chemical analysis
Chinese Classification:	N33-Electron optics and other physical optics instrument
Professional Classification:	GB-National Standard
Related Keywords:	chemical analysis-sputter depth profiling-optimization reference materials scopein order multi-layer film system reference materials depth resolution depth analysis
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《GB/T 20175-2006表面化学分析溅射深度剖析用层状膜系为参考物质的优化方法》由TC38（全国微束分析标准化技术委员会）归口，TC38SC2（全国微束分析标准化技术委员会表面化学分析分会）执行，主管部门为国家标准化管理委员会。
本标准采用适当的单层和多层膜系参考物质，提供优化溅射深度剖析参数的指南。

Scope

In order to optimize the instrument settings of Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy and Secondary Ion Mass Spectrometry to achieve depth resolution, this standard uses appropriate single-layer and multi-layer film system reference materials to provide optimized sputtering depth analysis. A guide to parameters. The use of special multilayer systems (such as various doped layer systems) is not covered by this standard.

More samples: JGJ 94-2008 NB/T 47013.2-2015 JJG 21-2008

Sample only — not a preview of GB/T 20175-2006

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