GB/T 20510-2017 in English
SUPERSEDEDIndium-tin oxide target
- Issued on:2017-10-14
- Implemented on:2018-05-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$156.00
《GB/T 20510-2017氧化铟锡靶材》由TC243(全国有色金属标准化技术委员会)归口,TC243SC2(全国有色金属标准化技术委员会重金属分会)执行,主管部门为中国有色金属工业协会。
Introduction
1. Standard Overview
GB/T 20510-2017 "Steel Tin Oxide Target Material" standard specifies the requirements, test methods, inspection rules and marking, packaging, transportation and storage of steel tin oxide targets. It is applicable to steel tin oxide targets produced with 99.99% metallic indium and tin as raw materials, and is used to make transparent conductive films.
2. Comparison of standard frameworks
| Standard content | GB/T 20510-2017 | GB/T 20510-2006 |
|---|---|---|
| Chemical composition control | In₂O₃:SnO₂=90:10, deviation±0.5% | Same |
| Impurity element control | Fe, Al, Si, Cu, Pb content≤15, 10, 15, 5 ppm, newly added Cr and Ni content control | Only control Zn, Ca, Mg |
| Relative density range | RD99.0, RD99.5, RD99.7, deviation ±0.2 | Same |
3. Interpretation of technical requirements
The chemical composition of tin oxide target is its core requirement, which is mainly composed of In₂O₃ and SnO₂, with a ratio of 90:10. Impurity elements are strictly controlled, and restrictions on elements such as Cr and Ni are added. At the same time, the surface quality requirements are Ra<1.6μm, uniform color and no cracks.
4. Implementation suggestions
Enterprises should strictly follow the standards for chemical composition analysis and physical property testing during the production process. It is recommended to use high-precision instruments such as Kelvin bridge to measure resistivity, and combine GB/T 16535 to test linear expansion coefficient.
5. Standard background and technology evolution analysis
This standard replaces the old version of GB/T 20510-2006. The main changes include the deletion of oxygen loss rate requirements and the addition of surface roughness and tissue uniformity indicators. These improvements reflect the industry's increased requirements for material performance and technological progress.

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