GB/T 26251-2010 in English

《GB/T 26251-2010氟及氟氮混合气》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC1（全国半导体设备和材料标准化技术委员会气体分会）执行，主管部门为国家标准化管理委员会。

Scope

This standard specifies the technical requirements, test methods, packaging, labeling, storage and transportation and safety requirements of fluorine and fluorine-nitrogen mixed gas. This standard applies to the fluorine obtained after electrolysis of anhydrous hydrogen fluoride and purification process. Fluorine is used to prepare fluorides such as uranium hexafluoride, sulfur hexafluoride, boron trifluoride, silver difluoride, cobalt trifluoride and magnesium trifluoride, and can also be used in laser gas or plastic fluorination treatment and other fields. The preparation of fluorine-nitrogen mixed gas adopts the pressure method. The mixed gas is mainly used in the fluorination treatment of materials in the automobile and pharmaceutical industries.