GB/T 34894-2017 in English

VALID

Micro-electromechanical system technology-Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer

Issued on:2017-11-01
Implemented on:2018-05-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $220.00
$214.00

Standard No:	GB/T 34894-2017
Document status:	VALID
Title in English:	Micro-electromechanical system technology-Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer
Title in Chinese:	微机电系统（MEMS）技术基于光学干涉的MEMS微结构应变梯度测量方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2017-11-01
Implemented on:	2018-05-01
ICS Classification:	31.200-Integrated circuits. Microelectronics
Professional Classification:	GB-National Standard
Related Keywords:	strain gradient measurements strain gradient technology-measuring method optical interference microscope optical interferometer scopethis standard
Related Topics:	microstructure MEMS mems Technology Mems microstructure in-plane length measurement method based on optical interference mems technology Mems microstructure in-plane length measurement method based on optical interference Strain Gradient Measurement Optical system structure Gradient strain gauge microcavity interference mems technology gradient measurement mems technology optical properties Microphotometry mems structure measurement gradient structure gradient structure mems measurement Micro-measurement of optical rotation Microdose system gradient method degree system gradient system Microphotometry interference of light mems test system microsystem technology GBT34894 GB/T 34894-2017 National standard number of structural strain measurement method Electromechanical How to measure potential gradient Methods for measuring accuracy of structural deformation

《GB/T 34894-2017微机电系统（MEMS）技术基于光学干涉的MEMS微结构应变梯度测量方法》由TC336（全国微机电技术标准化技术委员会）归口，主管部门为国家标准化管理委员会。

Scope

This standard specifies a method for measuring strain gradient based on the surface morphology of a micro-cantilever structure obtained using an optical interference microscope. This method is applicable to micro-cantilever structures with a surface reflectivity of not less than 4% and whose surface morphology can be obtained using an optical interference microscope.

More samples: JGJ 94-2008 JC/T 2453-2018 DL/T 368-2010

Sample only — not a preview of GB/T 34894-2017