microcavity interference
microcavity interference, Total:20 items.
The international standard classification for "microcavity interference" includes: Linear and angular measurements , Measuring instruments , Testing of metals , Integrated circuits. Microelectronics .
The Chinese standard classification for "microcavity interference" includes: Length Measurement , Measuring tool and instrument , Metallographic testing method , Metal physical property test method , Microcircuit in general .
National Metrological Verification Regulations of the People's Republic of China
- JJG 371-2005 Verification Regulation of Gauge Block Interferometers
- JJG 77-2006 Verification Regulation of Interference Microscopes
- JJG 661-2004 Verification Regulation of Flatness Interferometer with Isoclinic Circle Fringe
- JJG 101-2004 Verification Regulation of Contact-type Interferometers
- JJG 739-2005 Verification Regulation of Laser Interferometers
- JJG 77-1983 Verification Regulation of Interference Microscope
国家能源局
- SY/T 7340-2016 Riser interference
Professional Standard - Machinery
- JB/T 5610-2006 Laser interferometer
- JB/T 5610-1991 Dual-frequency Laser Interferometer
机械电子工业部
- JB 5610-1991 Dual frequency laser interferometer
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
- GB/T 43313-2023 Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential interferometry optics
- GB/T 14145-1993 Test method for stacking fault density of epitaxial layers of silicon by interference contrast microscopy
工业和信息化部
- JB/T 13872-2020 Phase shift interferometer for flat
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会
- GB/T 34894-2017 Micro-electromechanical system technology-Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer
- GB/T 34893-2017 Micro-electromechanical system technology-Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
- GB/T 34900-2017 Micro-electromechanical system technology-Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer
Group Standards of the People's Republic of China
- T/SZBX 080-2022 Phase-shifting Laser Interferometer
SCC
- VDI/VDE 2655 BLATT 1.3-2020 Optical measurement technology on microtopographies - calibration of area-measuring interferometers and interference microscopes for shape measurement
VDI - Verein Deutscher Ingenieure
- VDI/VDE 2655 BLATT 1.3-2018 Optical measurement of microtopography - Calibration of interference microscopes for form measurement
International Telecommunication Union (ITU)
- ITU-R BO.2019-1999 Interference Calculation Methods
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