GB/T 43976-2024 in English

VALID

Electronic gas—Tetrafluoromethane

Issued on:2024-04-25
Implemented on:2024-11-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $250.00
$243.00

Standard No:	GB/T 43976-2024
Document status:	VALID
Title in English:	Electronic gas—Tetrafluoromethane
Title in Chinese:	电子气体四氟甲烷
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2024-04-25
Implemented on:	2024-11-01
Professional Classification:	GB-National Standard
Related Keywords:	tetrafluoromethane electronic gas standard overview electronic gas tetrafluoromethane introduction gb/t electronic grade tetrafluoromethane important electronic gas indicators items requirements tetrafluoromethane purity
Related Topics:	fluorine PTFE Atomic Gasizer Methane gas detection electric quadrupole Lao Methane Methane gas measurement Non-methane total Electric methane methane methane peak time Tetraalkylmercury Non-methane calibration gas gas atom atom gas PTFE detection methane colored Non-methane peak type PTFE cup PTFE detection four-electron path Perfluorodecalin gas atom atom gas Methane gas detection near field of electric quadrupole UV methane indoor methane Methane gas detection Methane Gas Regulations Non-methane National Methane indoor methane Methane and non-methane analyzers Methane molecules are made of electronic body Methane and non-methane meter PTFE 15 grams of methane artificial methane Detection of methane in gas gas phase methane method methane half peak How to test methane gas Methane Methane Analyzer PTFE test Four-in-one gas detection Sea-gas methane technology electron gas Ministry of Military Industry PTFE Methane gas calibration Methane tuning Green Methane International Methane gas detection standards Methane gas calibration method Electronic grade trifluoromethane

《GB/T 43976-2024电子气体四氟甲烷》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC1（全国半导体设备和材料标准化技术委员会气体分会）执行，主管部门为国家标准化管理委员会。

Introduction

GB/T 43976—2024 Tetrafluoromethane Electronic Gas Standard Overview

This standard specifies the technical requirements, inspection rules, marking, packaging, transportation, storage and safety information requirements for electronic grade tetrafluoromethane, and is applicable to tetrafluoromethane prepared by purification of industrial tetrafluoromethane.

Comparison of technical requirements and indicators

Items	Requirements
Tetrafluoromethane purity (volume fraction) /10-2	≥99.999
Oxygen + Argon content (volume fraction) /10-6	<1
Nitrogen content (volume fraction) /10-6	<4
Carbon monoxide content (volume fraction) /10-6	<0.1

Background of Standard Formulation and Analysis of Technological Evolution

With the rapid development of the semiconductor industry, electronic gases are key materials, and their purity and impurity control directly affect product quality. Tetrafluoromethane, as an important electronic gas, is used in plasma etching, thin film deposition and other fields in semiconductor manufacturing.

The formulation of this standard is based on many years of industry practice and technical accumulation, combined with advanced domestic and foreign experience, and aims to meet the gas quality requirements of high-precision electronic devices.

More samples: YD/T 3934-2021 GB 18306-2015 NB/T 47013.2-2015

Sample only — not a preview of GB/T 43976-2024

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