GB/T 44631-2024 in English

VALID

Requirements for wafer carrier handoff parallel I/O interface

Issued on:2024-09-29
Implemented on:2025-04-01
File Format:PDF
Delivery:Via email within 5 business days

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Standard No:	GB/T 44631-2024
Document status:	VALID
Title in English:	Requirements for wafer carrier handoff parallel I/O interface
Title in Chinese:	晶片承载器传输并行接口要求
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 5 business days
Issued on:	2024-09-29
Implemented on:	2025-04-01
ICS Classification:	31.260-Optoelectronics. Laser equipment
Chinese Classification:	L97-Dedicated processing equipment
Professional Classification:	GB-National Standard
Related Topics:	transmission equipment transmission equipment

《GB/T 44631-2024晶片承载器传输并行接口要求》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准委。

Introduction

Interpretation of the core content of the standard

This standard specifies the technical requirements for the parallel interface of wafer carriers for transmission between active and passive devices in the field of semiconductor manufacturing, covering key links such as signal definition, timing control, and exception handling.

Signal System Architecture

Signal Type	Transmission Direction	Typical Applications	Key Parameters
VALID	A→P	Communication Validity Verification	ON/OFF State Transition Delay≤0.1s
TR_REQ	A→P	Transmission Request Trigger	Response Time≤2s(TA2 Timer)
HO_AVBL	P→A	Equipment availability	Anomaly detection time ≤ 60s (TP3)

Technology evolution analysis

Compared with the earlier version, the main improvements of the 2024 version of the standard include:

Added OHS system dedicated signals (VA/VS_0/VS_1)
Cleared the control logic of the continuously transmitted CONT signal
Refined the anomaly detection timer parameters (TP1-TP6)

Implementation recommendations

Equipment integration solution

Equipment type	Interface configuration	Typical application
Overhead Shuttle (OHS)	Dual-port shared interface	interbay area transfer
Stocker	Independent port interface	intrabay cache

Exception Handling Flow

Detection phase: identify abnormalities through HO_AVBL/ES signals
Diagnosis phase: locate faults based on TP3/TP4 timers
Recovery phase: operate according to the process in Chapter 7.3 of the standard

Connector Technical Specifications

Parameter	Requirement	Test method
Power isolation	≥500V withstand voltage	GB/T 15125-1994
Signal delay	≤100ns	Oscilloscope detection
Plug and unplug life	≥5000 times	Mechanical endurance test

For typical connector configuration, please refer to the diagram in Chapter 8.4 of the standard. Note that the 24VDC power supply needs to be isolated from other circuits.

More samples: JJG 21-2008 QC/T 942-2021 YD/T 3934-2021

Sample only — not a preview of GB/T 44631-2024