GB/T 44375-2024 in English

VALID

Requirements for load ports of 300mm semiconductor equipment

Issued on:2024-08-23
Implemented on:2025-03-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $270.00
$262.00

Standard No:	GB/T 44375-2024
Document status:	VALID
Title in English:	Requirements for load ports of 300mm semiconductor equipment
Title in Chinese:	300mm半导体设备装载端口要求
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2024-08-23
Implemented on:	2025-03-01
ICS Classification:	31.260-Optoelectronics. Laser equipment
Chinese Classification:	L97-Dedicated processing equipment
Professional Classification:	GB-National Standard
Related Keywords:	semiconductor equipment semiconductor equipment introduction load ports equipment compatibility size requirements
Related Topics:	port semi-quantitative equipment semiconductor equipment Semiconductor equipment vector + transient vector Sealing of semiconductor equipment Equipment Export Requirements semiconductor equipment Semiconductor device model Semiconductor Equipment Chassis hfss wave port setting requirements Shockproof requirements for vehicle-mounted equipment Semiconductor equipment industry Semiconductor packaging requirements Semiconductor equipment testing Semiconductor Equipment Electrical Semiconductor ink specification requirements Semiconductor equipment materials Semiconductor equipment execution Semiconductor industry equipment Semiconductor vacuum equipment installation Anti-static semiconductor equipment Vibration of semiconductor handling equipment Aluminum alloy for semiconductor equipment Semiconductor equipment plastics Semiconductor equipment quartz ring Semiconductor industry equipment standards Semiconductor equipment airtight Cables for semiconductor equipment Semiconductor equipment related execution

《GB/T 44375-2024300mm半导体设备装载端口要求》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准委。

Introduction

1. Background and significance of standard formulation

With the rapid development of the semiconductor industry, 300 mm wafers have become the mainstream of the industry. As the key interface between equipment and production lines, the standardization of loading ports is of great significance for ensuring equipment compatibility and improving production efficiency. This standard aims to unify the requirements for loading ports of semiconductor equipment and standardize technical indicators such as size, configuration and safety distance.

2. Comparison of standard frameworks

Dimensions	Frame requirements	Front-opening cassette requirements
C1	S≥420	S≥505
D3	D3≤190	D3′≤165
H3	Unlimited	0≤H3≤75

3. Analysis of technological evolution

Load port technology has gone through a development process from simple mechanical interface to intelligent and modular. This standard introduces the installation space for photoelectric sensors (D7, H7) and the exclusive space for ID readers (D3, D4), reflecting the industry's demand for automation and efficient management.

4. Implementation Advice

Design Optimization Advice

Give priority to the standard configuration options (see Figure 1) to ensure equipment compatibility.
Plan the load port layout reasonably to ensure that the inclination of the wafer carrier is 0°.

Installation Precautions

Strictly reserve space for photoelectric sensors and ID readers according to the size requirements (D8≥30, H7=250).
Ensure that the height of the roller conveyor meets the ergonomic requirements (H=890～1010).

Maintenance and Calibration

Regularly check the installation position deviation of the photoelectric sensor to ensure that the height of the center point of the light beam meets the requirements (H9≤22) to avoid abnormal operation of the equipment.

More samples: JC/T 2453-2018 JJG 21-2008 QC/T 942-2021

Sample only — not a preview of GB/T 44375-2024