YS/T 1559-2022 in English
VALIDHigh purity hafnium oxide
- Issued on:2022-09-30
- Implemented on:2023-04-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$175.00
本文件规定了高纯氧化铪的分类、技术要求、试验方法、检验规则、标志、包装、运输、贮存及随行文件和订货单内容。
本文件适用于制取光学镀膜、半导体镀膜、精密电子陶瓷和特种合金等的高纯氧化铪。
Introduction
Analysis of the core content of the standard
| Technical parameters | HfO2-1 grade | HfO2-2 grade |
|---|---|---|
| Purity requirement | ≥99.95% | ≥99.9% |
| Proportion of ZrO2 | ≤0.03% | ≤0.05% |
| Key impurity control | Fe≤0.001%, Si≤0.002% (Grade 1 standard) | |
Detailed explanation of key technical requirements
The standard divides the product into two grades: HfO2-1 and HfO2-2. The main differences are:
- Purity threshold: Optical grade applications require 99.95% benchmark purity
- Zirconium element control: The Zr/(Hf+Zr) ratio of Grade 1 products is strictly controlled below 0.03%
- Particle size distribution: It must pass the GB/T 1480 standard test and can be customized according to special needs
Testing method system
Typical testing process example
When a semiconductor material company accepts HfO2-1 grade products:
- Randomly select 3 bags from a batch of 10 bags
- ICP-MS component analysis was performed using YS/T 568
- Fisherman particle size was determined according to GB/T 3249
- Compliance was determined by comparing the limits in Table 1 and Table 2
Key points for standard implementation
| Links | Critical control points |
|---|---|
| Packaging and transportation | Double seal for moisture proof, 25kg/bag weight tolerance ±0.05kg |
| Quality documents | Must include process description, raw material traceability, inspector's signature |
| Arbitration mechanism | Objections must be raised within 3 months of receipt |
Industry Application Guidelines
Products of this standard are mainly used in:
- Optical coating: High refractive index coating requires Grade 1 products
- Semiconductor gate dielectrics: Zr content is required to be ≤0.03%
- Electronic ceramics: Particle size distribution affects sintering density

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