YS/T 24-2016 in English
VALIDTest methods for spike of epitaxial layers
- Issued on:2016-04-05
- Implemented on:2016-09-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$97.00
本标准规定了外延钉缺陷的检验方法。
本标准适用于判断硅外延片上是否存在高度不小于4μm的钉缺陷。如果钉缺陷比较少且彼此不相连,本标准可用于钉缺陷的计数。本标准不能测量钉缺陷的高度。
Introduction
*** Please note: This description may not be accurate, please refer to the official documentation.

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