Sheet resistance of silicon epitaxial layer, diffusion layer and ion implantation layer
Sheet resistance of silicon epitaxial layer, diffusion layer and ion implantation layer, Total:2 items.
The international standard classification for "Sheet resistance of silicon epitaxial layer, diffusion layer and ion implantation layer" includes: Semiconducting materials .
The Chinese standard classification for "Sheet resistance of silicon epitaxial layer, diffusion layer and ion implantation layer" includes: Metal physical property test method , Semimetal and semiconductor material in general .
General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China
- GB/T 14141-2009 Test method for sheet resistance of silicon epitaxial,diffused and ion-implanted layers using a collinear four-probe array
- GB/T 14141-1993 Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array
