GB/T 14601-2009 in English
SUPERSEDEDGas for electronic industry-Ammonia
- Issued on:2009-10-30
- Implemented on:2010-05-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$175.00
《GB/T 14601-2009电子工业用气体 氨》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了氨的技术要求,试验方法,检验规则及产品的包装、标志、运输、贮存及安全要求。
本标准适用于半导体工业,氮化硅、氮化镓的化学气相淀积,也可用于硅或氧化硅的氮化。
Scope
This standard specifies the technical requirements, test methods and product packaging, labeling, transportation, storage and safety requirements for ammonia. This standard applies to the semiconductor industry, the chemical vapor deposition of silicon nitride and gallium nitride, and can also be used for the nitride of silicon or silicon oxide.
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