GB/T 14602-2014 in English

《GB/T 14602-2014电子工业用气体 氯化氢》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC1（全国半导体设备和材料标准化技术委员会气体分会）执行，主管部门为国家标准化管理委员会。
本标准规定了氯化氢的技术要求、试验方法、标志、包装、贮运及安全。
本标准适用于以工业氯化氢为原料,采用纯化制得的氯化氢产品。该产品主要用于微电子工业中气相抛光、外延和刻蚀工艺,也可用于硬质合金、玻璃表面处理、医药中间体和精细化学品制造、科学研究等领域。
分子式:HCl。
相对分子质量:36.458(按2009年国际相对原子质量计算)。

Scope

This standard specifies the technical requirements, test methods, signs, packaging, storage, transportation and safety of hydrogen chloride. This standard applies to hydrogen chloride products obtained by purification using industrial hydrogen chloride as raw material. This product is mainly used in vapor phase polishing, epitaxy and etching processes in the microelectronics industry, and can also be used in cemented carbide, glass surface treatment, pharmaceutical intermediates and fine chemical manufacturing, scientific research and other fields. Molecular formula: HCl. Relative molecular mass: 36.458 (calculated according to the international relative atomic mass in 2009).