GB/T 24469-2009 in English

《GB/T 24469-2009电子工业用气体 5N氯化氢》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了电子工业用气体　5N氯化氢的技术要求、检验方法、检验规则以及包装、标志、运输、储存、充装、分装和安全要求。
本标准适用于以工业氯化氢为原料经净化制得的瓶装液化氯化氢。

Scope

This standard specifies the technical requirements, inspection methods, inspection rules and packaging, marking, transportation, storage, filling, sub-packaging and safety requirements for the gas 5N hydrogen chloride used in the electronics industry. This standard applies to bottled liquefied hydrogen chloride produced from industrial hydrogen chloride as raw material through purification. Hydrogen chloride is mainly used in the vapor phase polishing, epitaxy and base corrosion processes of single crystal silicon wafers in the production of semiconductor devices in the microelectronics industry. It can also be used in cemented carbide and glass surface treatment, pharmaceutical intermediates and fine chemical manufacturing, scientific research and other fields. Molecular formula: HCl Relative molecular mass: 36.46l (according to the international relative atomic mass in 2005)