GB/T 1554-1995 in English

SUPERSEDED

Test method for crystallographic perfection of silicon by preferential etch techniques

Issued on:1995-04-18
Implemented on:1995-12-01
File Format:PDF
Delivery:Via email within 1~3 business days

Price(USD)： $410.00
$398.00

Standard No:	GB/T 1554-1995
Document status:	SUPERSEDED
Superseded by:	GB/T 1554-2009 Testing method for crystallographic perfection of silicon by preferential etch techniques
Superseded on:	2010-06-01
Title in English:	Test method for crystallographic perfection of silicon by preferential etch techniques
Title in Chinese:	硅晶体完整性化学择优腐蚀检验方法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	1995-04-18
Implemented on:	1995-12-01
ICS Classification:	77.040.30-Chemical analysis of metals
Chinese Classification:	H26-Metal nondestructive testing method
Professional Classification:	GB-National Standard
Related Keywords:	preferential etch techniques scopethis standard test method silicon crystals crystallographic perfection techniques
Related Topics:	the crystal High-quality chemical detection integrity chemical corrosion Corrosive by Polarization silicon crystal overall experiment method of producing crystals silicon crystal integrity detection method Integrity testing + sterility method of making crystals integrity detection method eutectic properties choose the best Crystal etch instrument chemical corrosion Excellent Qing of Chemistry Department Excellent Qing of Chemistry Department crystal integrity twin crystal GBT1554 GBT1554-1995 GB/T 1554-2009 Method for Chemical Preferential Etching of Silicon Crystal Integrity The significance of acrosome integrity Advantages and Disadvantages of Biochemical Testing Methodology Nucleic acid integrity detection method Semi-solid testing methods for organic chemical products Cell membrane integrity detection method Linear optimization method for biochemical reagents Electrochemical preparation of amorphous Liquid quality optimization method Analytical method optimization gradient selection Acid electrochemical corrosion Experimental method optimization Inspection methods and scientific content are complete Optimize detection methods Nucleic acid integrity identification methods Nanoliquid phase method optimization Pharmacopoeia method optimization Crystalline silicon detection method Cell membrane integrity detection method Ways to reduce merit-based bias Electrochemical methods for detecting gases ys/t 1554 Crystal Form Methodology Advantages of electrochemical methods The standard for testing the completion of sulfonation is Method validation detection limit is better than What methods are included in the dry chemical method?

《GB/T 1554-1995硅晶体完整性化学择优腐蚀检验方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了用择优腐蚀技术检验硅晶体完整性的方法。

Scope

This standard specifies the method for testing the integrity of silicon crystals by preferential etching techniques. This standard applies to crystal orientation <111> or <100>, resistivity 10^-3～10⁴Ω·cm, dislocation density between 0～10⁵cm< Inspection of native defects in silicon single crystal ingots or silicon wafers between superscript -2>.

More samples: JGJ 94-2008 DL/T 368-2010 JC/T 2453-2018

Sample only — not a preview of GB/T 1554-1995

Loading PDF document...

Error loading PDF. Please make sure the file is valid and try again.