GB/T 1558-2023 in English
VALIDTest method for substitutional carbon content in silicon by infrared absorption
- Issued on:2023-12-28
- Implemented on:2024-07-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$156.00
《GB/T 1558-2023硅中代位碳含量的红外吸收测试方法》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC2（全国半导体设备和材料标准化技术委员会材料分会）执行，主管部门为国家标准委。
Introduction
In-depth interpretation of infrared absorption test method for substitutional carbon content in silicon
1. Background and significance of standard formulation
GB/T 1558—2023 replaces the old standard GB/T1558—2009, and is mainly applicable to the test of substitutional carbon atom content in p-type silicon single crystals with resistivity greater than $3~\Omega\cdot\mathrm{cm}$ and n-type silicon single crystals with resistivity greater than $1~\Omega\cdot\mathrm{cm}$.
This standard has an important position in the field of semiconductor materials and is mainly used to evaluate the quality and performance of silicon materials. With the rapid development of the semiconductor industry, higher requirements are put forward for the control of impurity content in silicon materials, so it is particularly important to update and improve this standard.
2. Analysis of Technology Evolution
| Technical Dimensions | Old Standard (GB/T1558—2009) | New Standard (GB/T1558—2023) |
|---|---|---|
| Test Range | Test Range at Room Temperature: $5\times10^{15}~\mathrm{cm}^{-3}$ to the maximum solid solubility of carbon atoms in silicon. | New Low-temperature Test Range: When the temperature is lower than $80~K$, the test range shall not be less than $5\times10^{14}~\mathrm{cm}^{-3}$. |
| Method principle | A single-beam infrared spectrometer was used for testing. | The applicability of dual-beam and Fourier transform infrared spectrometers was added, and the method of subtracting lattice absorption by the difference spectrum method was optimized. |
| Instrument requirements | The instrument resolution requirements were not specified. | The resolution of the room temperature infrared spectrometer was added to $2~\mathrm{cm}^{-1}$, and the resolution of the low temperature infrared spectrometer was added to $1~\mathrm{cm}^{-1}$. |
3. Recommendations for Standard Implementation
Case Study: Practice of a Semiconductor Company
After introducing the new version of the standard, a semiconductor company achieved efficient carbon content testing through the following steps:
- Purchase a Fourier transform infrared spectrometer that meets the requirements (resolution $1~\mathrm{cm}^{-1}$).
- Optimize the sample preparation process to ensure that the sample is mirror-polished on both sides and has no surface defects.
- Establish a standardized test environment, control the temperature fluctuation within $\pm2~^\circ\mathrm{C}$, and use nitrogen to purge the optical path to reduce the influence of humidity.
- Accurately calculate the carbon content and retain two significant digits through the difference spectrum drawing method in Appendix A.
Loading PDF document...
Error loading PDF. Please make sure the file is valid and try again.
We also recommend
-
GB/T 14140-2025 in English
Test method for measuring diameter of semiconductor wafer
2025-08-01 -
GB/T 19199-2015 in English
Test methods for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy
2015-12-10 -
GB/T 24581-2022 in English
Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method
2022-03-09 -
GB/T 32277-2015 in English
Test method for instrumental neutron activation analysis (INAA) of silicon
2015-12-10 -
GB/T 47080-2026 in English
Test method for dislocation density of diamond single crystal polished wafer
2026-01-28 -
GB/T 37385-2019 in English
Test method for chloride content of silicon—Ion chromatography method
2019-03-25
