GB/T 19199-2015 in English
VALIDTest methods for carbon acceptor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy
- Issued on:2015-12-10
- Implemented on:2016-07-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$88.00
《GB/T 19199-2015半绝缘砷化镓单晶中碳浓度的红外吸收测试方法》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了半绝缘砷化镓单晶中碳浓度的红外吸收测试方法。
本标准适用于电阻率大于106Ω・cm 的非掺杂和碳掺杂半绝缘砷化镓单晶中碳浓度的测定。测量范围:室 温 下 从 1.0×1015 atoms/cm3 到 代 位 碳 原 子 的 最 大 溶 解 度,77 K 时 检 测 下 限 为4.0×1014atoms/cm3。
Scope
This standard specifies the infrared absorption test method for carbon concentration in semi-insulating gallium arsenide single crystal. This standard applies to the determination of the carbon concentration in non-doped and carbon-doped semi-insulating gallium arsenide single crystals with a resistivity greater than 106Ω·cm. Measuring range: from 1.0 × 1015 atoms/cm3 to the maximum solubility of substituting carbon atoms at room temperature, and the lower detection limit is 4.0×1014 atoms/cmat 77 K 3.

Loading PDF document...
Error loading PDF. Please make sure the file is valid and try again.
We also recommend
-

GB/T 14140-2025 in English
Test method for measuring diameter of semiconductor wafer
2025-08-01 -

GB/T 32277-2015 in English
Test method for instrumental neutron activation analysis (INAA) of silicon
2015-12-10 -

GB/T 24581-2022 in English
Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method
2022-03-09 -

GB/T 47080-2026 in English
Test method for dislocation density of diamond single crystal polished wafer
2026-01-28 -

GB/T 29056-2025 in English
Determination of impurity content in trichlorosilane for silicon epitaxy—Inductively coupled plasma mass spectrometry
2025-10-31 -

GB/T 35306-2023 in English
Determination of carbon and oxygen content in single crystal silicon—Low temperature fourier transform infrared spectrometry method
2023-08-06 -

GB/T 37211.1-2018 in English
Methods for chemical analysis of germanium metal—Part 1:Determination of arsenic content—Arsenic stain method
2018-12-28 -

GB/T 38976-2020 in English
Test method for the oxygen concentration in silicon materials—Inert gas fusion infrared detection method
2020-07-21