GB/T 37211.1-2018 in English
VALIDMethods for chemical analysis of germanium metal—Part 1:Determination of arsenic content—Arsenic stain method
- Issued on:2018-12-28
- Implemented on:2019-11-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$97.00
《GB/T 37211.1-2018金属锗化学分析方法 第1部分：砷含量的测定 砷斑法》由TC203（全国半导体设备和材料标准化技术委员会）、全国有色金属标准化技术委员会联合归口，TC203SC2（全国半导体设备和材料标准化技术委员会材料分会）执行，主管部门为国家标准化管理委员会。
Introduction
GB/T 37211.1—2018 Interpretation of the Standard
GB/T 37211.1—2018 "Metallic Germanium Chemical Analysis Methods Part 1: Determination of Arsenic Content Arsenic Spot Method" is an important standard for the detection of arsenic impurities in high-purity metallic germanium in China. This standard specifies in detail the principle, reagent requirements, instrumentation and operation steps for the quantitative determination of arsenic in germanium materials using the arsenic spot method, and is applicable to the determination of arsenic content in samples such as reduced germanium ingots, reduced germanium powder, zone melting germanium ingots and their waste.
Background of Standard Formulation
As an important component of semiconductor materials, metallic germanium plays an irreplaceable role in the electronics industry. With the advancement of science and technology, the demand for high-purity germanium is increasing, and the detection accuracy requirements for impurity elements (especially arsenic) are also getting higher and higher. The formulation of the GB/T 37211.1—2018 standard fills the gap in the field of high-purity germanium arsenic impurity analysis in China, and provides technical support for ensuring product quality.
Method Principle and Technical Evolution
This standard adopts the arsenic spot method as the main means of determining arsenic content. Its basic principle is to convert the arsenic element in the sample into an easily detectable form (such as mercuric arsenide spots) through chemical reactions, and then conduct quantitative analysis by comparing it with the standard color scale.
| Technical parameters | Indicator range | Detection accuracy | Applicable sample types |
|---|---|---|---|
| Measurement range | $0.1\times10^{-4}\% \sim 1.0\times10^{-4}\% | Repeatability limit (r): $0.000005\% \sim 0.000025\% | Reduced germanium ingot, zone melting germanium ingot, etc. |
| Reagent purity requirement | MOS grade or equivalent nitric acid and hydrochloric acid | Reproducibility limit (R): $0.000010\% \sim 0.000030\% | Ge single crystal and its waste |
Implementation suggestions
To ensure the effective implementation of GB/T 37211.1—2018 standard, it is recommended that:
- Laboratory personnel need to receive professional training and be familiar with the operating procedures of the arsenic spot method.
- Strictly control the purity of reagents, especially the use of nitric acid and hydrochloric acid.
- Regularly calibrate instruments and equipment to ensure the normal operation of key equipment such as arsenic fumigation bottles and hot plates.
- Establish a standard sample database for method validation and quality control.
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