GB/T 17170-2015 in English
VALIDTest method for the EL2 deep donor concentration in semi-insulating gallium arsenide single crystals by infrared absorption spectroscopy
- Issued on:2015-12-10
- Implemented on:2016-07-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
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《GB/T 17170-2015半绝缘砷化镓单晶深施主EL2浓度红外吸收测试方法》由TC203(全国半导体设备和材料标准化技术委员会)归口,主管部门为国家标准化管理委员会。
本标准规定了半绝缘砷化镓单晶深施主 EL2浓度的红外吸收测试方法。
本标准适用于电阻率大于106 Ω・cm 的非掺杂和碳掺杂半绝缘砷化镓单晶深施主 EL2浓度的测定。
本标准不适用于掺铬半绝缘砷化镓单晶深施主 EL2浓度的测定。
Scope
This standard specifies the infrared absorption test method for deep donor EL2 concentration in semi-insulating gallium arsenide single crystal. This standard applies to the determination of the concentration of deep donor EL2 in non-doped and carbon-doped semi-insulating gallium arsenide single crystals with a resistivity greater than 106 Ω·cm. This standard does not apply to the determination of EL2 concentration of chromium-doped semi-insulating gallium arsenide single crystal deep donor.

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