GB/T 39144-2020 in English

VALID

Test method for magnesium content in gallium nitride materials—Secondary ion mass spectrometry

Issued on:2020-10-11
Implemented on:2021-09-01
File Format:PDF
Delivery:Via email within 1~3 business days

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Standard No:	GB/T 39144-2020
Document status:	VALID
Title in English:	Test method for magnesium content in gallium nitride materials—Secondary ion mass spectrometry
Title in Chinese:	氮化镓材料中镁含量的测定二次离子质谱法
Language:	English
File Format:	Electronic (PDF)
Delivery:	Via email within 1~3 business days
Issued on:	2020-10-11
Implemented on:	2021-09-01
ICS Classification:	77.040-Testing of metals
Chinese Classification:	H17-Semimetal and semiconductor material analysis method
Professional Classification:	GB-National Standard
Related Topics:	Premium Used Ion Chromatography secondary ion mass spectrometry secondary ion chromatography Premium Used Ion Chromatography Magnesium content ion mass spectrometry ion mass spectrometry Quality of Used Ion Chromatography Stable Used Ion Chromatography High Quality Used Mass Spectrometry Quality of Used Mass Spectrometers secondary deionized water Mass spectrometry test method Precursor ion peak in mass spectrum secondary derivative spectrum mass spectrometry Mass Spec + Precursor Ion Peak Selection of Precursor Ion Peaks in MS/MS Spectrometry primary ion source Secondary Ion Spectroscopy Content detection by mass spectrometry Ion Trap MS/MS Mass Spectrum Molecular Weight The molecular weight of the second GaN Gallium+ water quality testing method Secondary Ion Mass Spectrometry Operation ion pairs in mass spectrometry Mass Spectrometry Molecular Weight Are there many X-type ions in the secondary mass spectrometer? Secondary Mass Spectrometry Product Ions Mass spectrometry content Mass content MS ionization method Precursor ions for mass spectrometry Mass spec + content MS ionization open ionization mass spectrometry Mass spectrometric molecular weight Secondary range Precursor Ions in Mass Spectrometry Secondary Ion Mass Spectrometry faraday cup Secondary Ion Mass Chromatography MS ionization method Determination of Deuterium Content in Water by Mass Spectrometry Boron Content in Gallium Arsenide Mass spectrometry test method Ionization methods for mass spectrometry Secondary ion mass spectrometry+ magnetic field ions ion mass spectrometry Mass spectrometric detection of transitions Mass Spec Ion Hydrazine ion spectrum mass spectrometry ion spectrum The molecular weight in the mass spectrum is more than 7 Mass Spectrometry Molecular Weight 58 ions in the mass spectrum Mass Spectrum Molecular Weight 26 Fe ion mass spectrometry secondary deionization Determination of Precursor and Product Ions in Mass Spectrometry How to select product ions in secondary mass spectrometry Ion source for mass spectrometry Mass Spectrum Molecular Weight 43 Several ionizations in mass spectrometry Secondary Ionization Mass Spectrometry mass spec ion peak mass Ionization methods in mass spectrometry ion sample mass spectrometry Ion source detection Secondary ion mass spectrometry data Mass Spectrum Molecular Weight 36 Determination of total nitrogen by mass spectrometry Mass spec b-ions Secondary Ion Spectroscopy Mass Spectrometry Ionization Methods in negative ion spectrum MS ionization method Mass Spectrum and Assay open ionization mass spectrometry ion mass spectrometry GaN single crystal How to Determine Precursor Ions and Product Ions in Quadrupole Mass Spectrometry How are precursor ions and product ions determined in quadrupole mass spectrometry? How to prepare samples for secondary ion mass spectrometry Gallium ion titration precursor ion mass secondary ion probe nitrogen material ion mass spectrometry Ions in a mass spectrum precursor ion mass Gas Secondary Mass Spectrometry Major ions in mass spectrometry Titration method for determination of gallium in gallium waste mass ionizer Magnesium Mass Spectrometry Content material quadratic pcr Ionization methods in mass spectrometry Secondary deionized water? The energy of the secondary electron Secondary Electron Mass Spectrometry tof mass spectrum power MS double ion peak Quantity of product ions in mass spectrometry Detecting Transitions in Mass Spectrometry Secondary electron energy is low gallium quantum dots MS ion cluster deionized secondary water deionized water or secondary Mass Spectrometric Ionization Methods Mass Spectrum Peak Precursor Ion Cations in Mass Spectrometry Equipment for Determination of Ion Content Ionization Methods in Mass Spectrometry Ions in mass detection Mass spectrometry content Ion peaks in a mass spectrum Secondary Electron Mass Spectrometry secondary carrier mass spectrometer ion Mass content Secondary Electron Spectrum Gallium hydrate ion Ion Hydrazine Mass Spectrometry liquid secondary mass spectrometry Mass Spec + Testing + Methods Magnesium content Medium molecular weight secondary ion mass spectrometry Mass spec major ions What is the content of sodium and magnesium ions in the water quality Magnesium ion content method mass spectrometer ion The cation of 17 in the mass spectrum secondary ion source Ion source detection Precursor ion peaks in mass spectra Secondary Electron Mass Spectrometry There are many ions in the first mass spectrometry, but few ions in the second mass spectrometry secondary particle secondary effect Nitrogen in Mass Spectrometry ion pair mass Determination of Ion Peaks in Mass Spectrometry Mass Spectrometry Precursor Ion Peak Ion source in mass spectrometry Major Ions for Mass Spectrometry The molecular weight in the mass spectrum is more than 54 The measuring range of mass spectrometry How to determine the parent ion in mass spectrometry Mass Spec + Precursor Ion Peak Secondary Electron Spectroscopy Major Ions in Mass Spectrometry Mass Spectrometry Ion Detection MS ionization method How to quantify by secondary mass spectrometry Mass Spectrometry Secondary Quantification precursor ion mass spectrometry Secondary ion mass spectrometry mode 9 ions in mass spectrometry Precursor Ions and Precursor Ions in Mass Spectrometry ionization mass spectrometry Mass Spec + Ion Pair Method Mass Spectrometer Nitrogen Content 质谱中分子量多44 Nitrogen content in water quality ionization measurement Nitrogen content of metallic materials Carriers in Gallium Nitride Gallium ion source secondary particle mass spectrometry Gallium hexahydride secondary ion spectrum Mass Spectrometer Nitrogen Mass Spectrometer Ionization Methods How Mass Spectrometry Ionizes maldi's secondary mass spectrometry Secondary mass spectrometry main information Water magnesium ion content Precursor ion mass for mass spectrometry Ion content in mass spectrometry magnetic field secondary ions secondary neutron Gallium Ion Source Mass spectrometry content Secondary electron energy Secondary Ion Definition Gallium ion source total nitrogen determination ion Ionization method of MS/MS Determination of total nitrogen ions ion+mass spec+ Colloidal Gallium Secondary ion mass spectrometry oxygen Secondary ion mass spectrometry b zwitterionic material Magnesium ion determination UV secondary ions Gallium Nitride Test Ions of mass spectrum 58 Chloride ion in secondary water Magnesium content GBT39144 GB/T 39144-2020 How to use the two-dimensional measuring instrument Mass spectrometry APCI ion source measures substance molecular weight +36 Secondary Ion Mass Spectrometry Cell Disadvantages of secondary ion mass spectrometry PCR magnesium ion function Mass Spectrometry 4500 Split Ion Source In the mass spectrum if the mass of the precursor ion m1 and the product ion m2 Adsorbed gallium ions Secondary ion mass spectrometry oncology "Method for determination of arsenic cations in building materials" Secondary mass spectrometry precursor ions Nitriding How to measure magnesium ion content Secondary ion mass spectrometer test method Nitrogen content control in steel Regulations on the number of measurements Wood nitrogen content detection method secondary Preparation method of gallium nitride Ionic intermediate membrane quality The methods of ionization in mass spectrometry include Method for generating gallium nitride at room temperature Method nitrogen next day Magnesium ion content standard in saliva Chemical methods for testing magnesium ions in high schools Determination of divalent copper ions Primary column debugging method for secondary ion mass spectrometer Material copper ion content Mass spectrometry ionization method in English Quality of sub-powder Method for determining flow rate of mass spectrometry ion source Method for determination of magnesium ions in mixtures The methods for determining sodium ions in secondary iron concentrate are:

《GB/T 39144-2020氮化镓材料中镁含量的测定二次离子质谱法》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC2（全国半导体设备和材料标准化技术委员会材料分会）执行，主管部门为国家标准化管理委员会。

Introduction

Interpretation of the core content of the standard

This standard specifies the method for determining the magnesium content in gallium nitride materials using a sector magnetic field secondary ion mass spectrometer. The lower limit of determination is 5×10¹⁴cm^-3, and is suitable for quality control in the production and research and development of semiconductor materials.

Principle and technical features of the method

Technical elements	Parameter requirements	Technical significance
Vacuum degree	Better than 10^-6Pa	Ensure ion transmission efficiency
Primary ion source	Oxygen ion beam	Increase magnesium ion yield
Detector configuration	Electron multiplier + Faraday cup	Achieve wide dynamic range detection

Control of key interference factors

The standard particularly emphasizes the impact of the memory effect and requires that samples with high magnesium content must be fully cleaned after testing. Actual cases show that the blank value may increase by 30-50% if it is not cleaned.

The sample surface treatment requires a roughness ≤ 2nm. Chemical mechanical polishing can significantly improve the test reproducibility. Data from a certain laboratory showed that the RSD after polishing dropped from 15% to 6%.

Standard sample system construction

The standard requires the establishment of a standard sample system covering the concentration range of 5×10¹⁵-1×10²⁰cm^-3, with an inhomogeneity of ≤5%. Suggestions for practical application:

Each batch of tests contains 3 concentration standards
Regularly verify the stability of the standards
Establish secondary standards within the laboratory

Implementation suggestions and precautions

1. Instrument status verification: Before testing, it is necessary to confirm that the 69Ga⁺ counting rate is > 1×10⁸s^-1

2. Test sequence optimization: It is recommended to use the "standard-blank-sample to be tested" cycle test mode

3. Data validity judgment: When the blank value exceeds 20% of the sample to be tested, the test should be terminated

More samples: DL/T 368-2010 YD/T 3934-2021 JGJ 94-2008

Sample only — not a preview of GB/T 39144-2020

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