GB/T 35306-2023 in English

1. Background and significance of standard formulation

GB/T 35306-2023 is the latest national standard for the determination of carbon and oxygen content in silicon single crystals, replacing the original GB/T 35306-2017. The new standard has been comprehensively optimized in terms of method principles, scope of application and technical requirements to meet the increasingly stringent demand of the semiconductor industry for high-purity silicon materials.

2. Comparison of standard frameworks

4. Analysis of Technological Evolution

From GB/T 35306—2017 to GB/T 35306—2023, the main technical improvements include:

• Wavenumber range expansion: from $270~\mathrm{cm}^{-1}$ to $1250~\mathrm{cm}^{-1}$ to $270~\mathrm{cm}^{-1}$ to $1250~\mathrm{cm}^{-1}$
• Improved sample preparation requirements: emphasizing double-sided mirror polishing technology to reduce the impact of surface defects on test results
• Data processing optimization: introducing area method calculation to effectively reduce baseline noise interference

5. Implementation Suggestions

To ensure the effective implementation of the new standard:

1. Equipment selection: Select a low-temperature Fourier transform infrared spectrometer that meets the requirements to ensure that its resolution and wavenumber range meet the test requirements.
2. Sample preparation: Double-sided polishing is carried out in strict accordance with the standard requirements to avoid oxide layer and surface damage.
3. Data processing: The area method is used to calculate the substitutional carbon and interstitial oxygen content to ensure the accuracy and reliability of the results.
4. Quality control: Establish an internal quality control system, calibrate the instrument regularly and verify the accuracy of the test method.