GB/T 37385-2019 in English
VALIDTest method for chloride content of silicon—Ion chromatography method
- Issued on:2019-03-25
- Implemented on:2020-02-01
- File Format:PDF
- Delivery:Via email within 1~3 business days
$156.00
《GB/T 37385-2019硅中氯离子含量的测定 离子色谱法》由TC203(全国半导体设备和材料标准化技术委员会)归口,TC203SC2(全国半导体设备和材料标准化技术委员会材料分会)执行,主管部门为国家标准化管理委员会。
Introduction
1. Background and significance of the standard
GB/T 37385-2019 "Determination of chloride ion content in silicon - Ion chromatography" is an important standard in my country's semiconductor material field, which mainly stipulates the detection method of chloride ions in silicon materials. This standard is managed by the National Technical Committee for Semiconductor Equipment and Materials Standardization and is applicable to the quantitative analysis of chloride ions in rod-shaped, block-shaped, granular and flake silicon.
2. Method principle and technical route
This standard adopts the technical route of high-temperature heating-argon purge-ion chromatography detection. The specific steps are as follows:
- The sample is heated to 1500℃ in a high-temperature tube furnace, and the chlorine element is released in the form of Cl⁻;
- Use argon as a carrier to bring Cl⁻ into a bubbling absorption bottle for enrichment;
- The Cl⁻ content in the absorption liquid is analyzed by ion chromatograph.
3. Comparison table of standard frameworks
| Standard requirements | Specific indicators | Scope of application |
|---|---|---|
| Detection method | Ion chromatography | Quantitative analysis of chloride ions in silicon materials |
| Sample preparation | Crushed to 200-3000μm particles | Applicable to various forms of silicon materials |
| Detection range | 1.0~maximum solid solubility (μg/g) | Quality control of semiconductor materials |
4. Implementation suggestions and precautions
Case analysis: When a laboratory was testing silicon materials, it was found that the blank test results were abnormally high. After investigation, it was found that the problem was that the sample container of the high-temperature tube furnace was not pure enough. After replacing it with a sample container with Al₂O₃ purity ≥99%, the blank value was significantly reduced.

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