GB/T 16942-1997 in English

《GB/T 16942-1997电子工业用气体 氢》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了电子工业用氢的技术要求、试验方法和包装、标志、安全等。本标准适用于以工业氢为原料经纯化制取的钢瓶装氢气。

Scope

This standard specifies the technical requirements, test methods, packaging, marking, safety, etc. of hydrogen used in the electronics industry. This standard is applicable to cylinder-packed hydrogen produced by purifying industrial hydrogen as raw material. Hydrogen is mainly used to provide a reducing atmosphere, as a carrier gas for the epitaxial process and as a raw material for gas distribution of plasma etchant. Molecular formula: H₂ Relative molecular mass: 2.016 (according to the international relative atomic mass in 1991)