GB/T 16944-1997 in English

《GB/T 16944-1997电子工业用气体 氮》由TC203（全国半导体设备和材料标准化技术委员会）归口，主管部门为国家标准化管理委员会。
本标准规定了电子工业用液态和气态氮的技术要求、检验方法以及包装、标志等，适用于从分离空气或氨还原法制得的氮，在超大规模集成电路制造中用作净化、覆盖、保护、加压，也用于化学气相淀积时的载气等。

Scope

This standard specifies the technical requirements, inspection methods, packaging, and markings of liquid and gaseous nitrogen used in the electronics industry. It is applicable to nitrogen obtained from air separation or ammonia reduction, and used for purification, covering, and protection in the manufacture of VLSI. , pressurization, and also used as carrier gas during chemical vapor deposition. Nitrogen is chemically inert, nonflammable, and is an asphyxiating gas. Molecular formula: N₂. Relative molecular mass: 28.0134 (according to the international relative atomic mass in 1991).