GB/T 16944-2009 in English

《GB/T 16944-2009电子工业用气体 氮》由TC203（全国半导体设备和材料标准化技术委员会）归口，TC203SC1（全国半导体设备和材料标准化技术委员会气体分会）执行，主管部门为国家标准化管理委员会。
本标准规定了电子工业用气体氮的技术要求,试验方法以及包装、标志、贮运及安全。
本标准适用于以深冷法从空气中提取的气态和液态氮,以及经电化学方法得到的氮。它们在超大规模集成电路制造中用作保护、吹扫、覆盖、加压,化学气相淀积等。

Scope

This standard specifies the technical requirements, test methods, packaging, marking, storage, transportation and safety of nitrogen gas used in the electronics industry. This standard applies to gaseous and liquid nitrogen extracted from air by cryogenic methods, as well as nitrogen obtained by electrochemical methods. They are used for protection, purge, covering, pressurization, chemical vapor deposition, etc. in VLSI manufacturing.